Bake Plates

Brewer Science® Cee® precision bake plates feature excellent thermal uniformity and accuracy, robust process control, and exceptional reliability.


Bake plate with silicon wafer

Industry-leading precision

With temperature uniformities measuring within 0.3% across the working surface, Brewer Science® Cee® bake plates provide all the necessary precision for critical baking processes.

Process flexibility

Choose between contact, vacuum, and proximity baking methods, and utilize temperature ramping capabilities for the ultimate in baking process control.

Exceptional uptime and reliability

Rugged stainless steel construction combined with world-class technical support provide the peace of mind you need to focus on the process at hand.

Product Options

Brewer Science® Cee® bake plates are available in a variety of configurations to match your process requirements. Compare product specifications below to see which configuration is right for you, or contact us to request more information.

 

Cee® 1300X
Bake Plate

Cee® 10
Bake Plate

Cee® 11
Bake Plate

  Cee® 1300X bake plate Cee® 10 bake plate Cee® 11 bake plate
Substrate Sizes

Up to 200 mm round or 8″ × 8″ square

Up to 300 mm round or 14″ × 14″ square

Up to 450 mm round or 20″ × 20″ square

 

Precision

Temperature Range

Ambient to 300°C

Configurable to 400°C

Ambient to 300°C

Configurable to 400°C

Ambient to 200°C

Configurable to 250°C

Temperature Resolution

Within 0.1°C

Within 0.1°C

Within 0.1°C

Temperature Uniformity

0.3% across working surface

0.3% across working surface

0.3% across working surface

 

Control

Control Interface

Onboard Windows®-based PC with 7″ touch screen display

Dual 4-digit alphanumeric LED display

Full PID operation

Dual 4-digit alphanumeric LED display

Full PID operation

Connectivity

USB and ethernet ports for uploading/‌downloading process parameters

Bake Methods

Contact, vacuum, & proximity

Bake plate auto-sizing for 3″, 100-, 125-, and 200-mm wafers

Pneumatic lift pins for loading/‌unloading substrates

Contact & fixed proximity

Pneumatic lift pins for loading/‌unloading substrates

Optional vacuum and proximity bake available for 200- and 300-mm wafers

Contact & fixed proximity

Pneumatic lift pins for loading/‌unloading substrates

Optional vacuum and proximity bake available for 300- and 450-mm wafers

Proximity Baking Features

Optional electronic lift pins

Program up to 10 specific proximity heights from 0.000″ to 0.500″ above bake surface with a resolution of 0.001″ in any sequence or combination

Removable 0.020″ fixed-proximity standoffs

Removable 0.006″ fixed-proximity standoffs

 

Programmability

Onboard Storage

Up to 250,000 process recipe programs with a virtually unlimited number of program steps per recipe

Ramping

Up to 10 set points per recipe

Up to 8 set points

Up to 8 set points

Step Time

0.1 to 9,999.9 seconds with a resolution of 0.1 second

Security

Password protection available at no charge

 

Design

Cabinet Design

All–stainless steel construction

Bake Environment

Optional exhaust hood for removal of process vapors

Optional nitrogen purge for inert bake environment

Bake Plate Surface

Optional custom bake plate surfaces available

Dimensions

13.25″ W × 19″ D × 12″ H
(33.65 cm W × 48.26 cm D × 30.48 cm H)

Machine weight: 65 lb (29.48 kg)

Shipping weight: 148 lb (67.13 kg)

18.75″ W × 18.75″ D × 9.5″ H (47.7 cm W × 47.7 cm D × 24.2 cm H)

Machine weight: 75 lb (35 kg)

Shipping weight: 210 lb (95.5 kg)

29″ W × 29″ D × 9.5″ H (63.5 cm W × 63.5 cm D × 24.2 cm H)

Machine weight: 150 lb (68 kg)

Shipping weight: 280 lb (127 kg)

 

Utilities

Voltage Ranges

100–125, 208–240 VAC 50/60 Hz

208–240 VAC 50/60 Hz

208–240 VAC 50/60 Hz

Power Requirements

1683 watts
16.7 amps (100 VAC)
8.03 amps (208 VAC)

3005–4005 watts
14.4–16.7 amps

2351–3130 watts
12.5–15.5 amps

Exhaust Port

1″ OD

2″ OD

2″ OD

Vacuum

20–25 in Hg

20–25 in Hg

20–25 in Hg

Exhaust

5–10 cfm

10–30 cfm

10–30 cfm

Nitrogen

35 psi

35 psi

35 psi

 

Support

Warranty

1-year full warranty on parts and labor

Technical Support

Free remote technical support (phone, email) for the life of the product

Applications Support

Free applications and process assistance for the life of the product