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Surface Protection

Backside processing steps such as etching and deposition require direct contact of front-side circuitry to the chuck in the deposition or etch chambers. The handling and chucking process can damage the fragile and expensive circuitry. Brewer Science offers scratch-resistant and spin-coatable materials for the protection of the front surface for backside processing and dicing.

Protek B3 Protective Coatings can replace mechanical clamps

Materials: ProTEK® SR coating
Equipment: Processing Equipment

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