New Materials for 193-nm Trilayer Imaging.

Oct 18, 2005

Authors: Jim D. Meador, Doug Holmes, Mariya Nagatkina, Rama Puligadda, Denise Gum, Randy Bennett, Sam Sun, Tomoyuki Enomoto -Toyama R&D Center, Nissan Chemical Industries, LTD. Proceedings: SPIE 2004