Brewer Science is pleased to announce the development of a new innovative scratch-resistant protective coating solution for DRIE etch processes. ProTEK^® SR coating is a spin-applied polymeric coating designed to provide maximum protection for fragile, etch-sensitive circuitry placed in direct contact against the interior chuck of the etch chamber. ProTEK^® SR coating offers durability and longevity against harsh, grueling backside DRIE processes typically utilized by the microelectromechanical systems (MEMS) and integrated circuit (IC) industries. The demand for intricate structural designs and increased density and performance expectations are driving the need to utilize DRIE for creating deep anisotropic etches of silicon for MEMS and semiconductor device applications. Brewer Science® ProTEK^® SR coating offers customers ease of use, removability, and reliable prevention of the yield hits associated with physical contact of the device wafer in the DRIE etch equipment.

The basic processing steps are:

"Apply ProTEK^® SR coating on CMOS or MEMS circuitry
Flip wafer over
Place in DRIE tool
Create via or trench by DRIE

 

Schematic depicting the recommended process flow for use of the ProTEK^® SR coating

About Brewer Science
Brewer Science delivers innovative material and process solutions for various applications including lithography, advanced packaging, MEMS, nanotechnology, optoelectronics, and compound semiconductors. The inventor of ARC® anti-reflective coating products for the microlithography world, Brewer Science continues to expand its scope with ProTEK^® temporary etch protective coatings, WaferBOND® temporary bonding materials, CNTRENE electronic-grade carbon nanotube solutions, and OptiNDEX™ high-refractive index materials. Exceptional technical expertise and extensive semiconductor industry knowledge, combined with world-class product and customer support, make Brewer Science a company that consistently enhances the value of the entire electronics industry.

For further information please contact Kimberly Yess, Director, Process and Material Innovations Business Unit, kyess@brewerscience.com, (US) +1.573.364.0300.