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The Anti-Reflective Coatings Symposium - Leuven
The ARC® Division of Brewer Science held a technical Anti-Reflective Coatings '04 Symposium, April 28th, 2004 in Leuven, Belgium. The goal of this symposium was to provide the opportunity to explore technical topics in regard to anti-reflective coatings in the microlithography process.
During the day long conference, eleven industry leaders presented varying topics, ranging from the Keynote from Kurt Ronse, speaking on "The New Lithography Roadmap: Challenges and Issues", to Hung-Wen Lin of Nanya/Infineon talking about the "Challenges of Selecting Bottom Anti-Reflective Coatings" to Madhukar Rao of Air Products & Chemicals talk on "CD Control in Lithography through Surfactant Chemistries".
To access more information about the latest symposium please view this linked page.
During the day long conference, eleven industry leaders presented varying topics, ranging from the Keynote from Kurt Ronse, speaking on "The New Lithography Roadmap: Challenges and Issues", to Hung-Wen Lin of Nanya/Infineon talking about the "Challenges of Selecting Bottom Anti-Reflective Coatings" to Madhukar Rao of Air Products & Chemicals talk on "CD Control in Lithography through Surfactant Chemistries".
To access more information about the latest symposium please view this linked page.