Brewer Science Announces New OptiStack® System of Products, The Most Versatile Multilayer Solution on the Market
February 14, 2012 – Brewer Science, the inventor of ARC® coatings and market leader for advanced patterning materials, is pushing the limits of patterning technology and process flexibility with the next generation of its OptiStack® system of products.
“Our focus is to give our customers more manufacturing options by providing flexible process solutions while reducing process cost. Our approach is to develop OptiStack® system products that look both forward, to enable NTD [negative-tone development], EUV, and DSA [directed self-assembly] patterning, and backward, to extend the use of KrF and ArF lithography,” said Darron Jurajda, Director of Brewer Science’s Semiconductor Business. “This builds on our 30 years of expertise of extending patterning technology through materials science and process applications.”
By providing materials that have variable optical properties and can work across multiple wavelengths, the OptiStack® system of products offers customers advantages over other multilayer systems by providing versatility regardless of the substrate or patterning technology. This adaptability gives semiconductor device manufacturers the advantage of being able to implement existing lithography equipment for newer technology nodes while decreasing the implementation time of new patterning technologies, which provides significant equipment and process cost savings.
Material development to support patterning at any feature size with OptiStack® multilayer system products includes:
- Materials that will extend the useful life of existing KrF, ArF, and ArF immersion lithography equipment
- Materials for use in NTD processes
- EUV assist layers for dose reduction and pattern transfer
- DSA substrates and pattern transfer layers
About Brewer Science
Brewer Science is a global technology leader in creating, developing, and manufacturing specialty materials, equipment, and process solutions for applications in semiconductors, advanced packaging/3-D ICs, MEMS, sensors, displays, LEDs, and printed electronics. The company's 30 years of in-depth knowledge and expertise in materials science, chemistry, physics, optics, modeling, and process integration distinguish it from all other material suppliers worldwide. Visit us at booth 225 during SPIE Advanced Lithography.
Learn more: www.brewerscience.com
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