Brewer Science Presents New Materials and Process Innovation at SPIE Advanced Lithography

Feb 25, 2013

February 25, 2013 – Brewer Science, inventor of ARC® anti-reflective coatings and the OptiStack® system, continues to deliver new versatile materials and process solutions that extend the boundaries of advanced lithography.

“Brewer Science is committed to providing flexible process solutions designed to fit each customer’s specific requirements. This allows our customers to have a more cost-effective custom process and helps them reduce future risk by being able to quickly modify their process as business needs change,” said Darron Jurajda, Director of Brewer Science’s Semiconductor Business. “In the past year, we have expanded our OptiStack® materials platform to include materials for negative-tone development (NTD), extreme ultraviolet (EUV), and directed self-assembly (DSA) patterning.”

Brewer Science will share these advancements at SPIE Advanced Lithography, February 24-28, 2013, in San Jose, California, by presenting the following papers:

Point-of-use filter membrane selection, start-up, and conditioning for low-defect photolithography coatings
Authors: Nickolas Brakensiek, Michael Cronin
Paper: 8682-73 • Tuesday, 26 February 2013 • 6:00 PM-8:00 PM

Evaluating spin-on carbon materials at low temperatures for high wiggling resistance
Authors: Michael Weigand, Vandana Krishnamurthy, Yubao Wang, Qin Lin, Douglas Guerrero, Sean Simmons, Brandy Carr
Paper: 8685-26 • Tuesday, 26 February 2013 • 6:00 PM-8:00 PM

Multifunctional hardmask neutral layer for directed self-assembly (DSA) patterning
Authors: Douglas J. Guerrero, Mary Ann Hockey, Yubao Wang, Eric Calderas
Paper: 8680-61 • Wednesday, 27 February 2013 • 6:00 PM-8:00 PM

Visit us at Booth 217 at SPIE Advanced Lithography.

To learn more about advanced lithography material solutions for semiconductor device fabrication, please contact Darron Jurajda, Director of Brewer Science’s Semiconductor Business, at djurajda@brewerscience.com.

About Brewer Science
Brewer Science is a global technology leader in developing and manufacturing advanced materials, processes, and equipment for the reliable fabrication of cutting-edge microdevices used in electronics such as tablet computers, smartphones, digital cameras, televisions, and LED lighting. Brewer Science provides process flexibility and a competitive edge for its customers and plays a critical role in the supply chain. Since 1981, when its ARC® materials revolutionized lithography processes, Brewer Science has expanded its technology to include products used in advanced lithography, chemical and mechanical device protection, thin layer handling, 3-D integration, and products based on carbon nanotubes and nanotechnology. With its headquarters in Rolla, Missouri, Brewer Science supports its worldwide customers through a service and distribution network in North America, Europe, and Asia.

Learn more about Brewer Science at www.brewerscience.com, follow us on Twitter @BrewerScience, or Like us on Facebook.

To schedule an interview with Darron Jurajda, or for more information contact:
Patti Shaw, Marketing Communications Manager, Brewer Science
pshaw@brewerscience.com
Tel: +1 573-364-0300