Second generation in 193nm anti-reflective coatings.

Oct 17, 2005

Authors: Jim Meador, Xie Shao, Vandana Krishnamurthy, Manuel Ajona, Mandar Bhave, Gu Xu, James Claypool, and Anne Lindgren. Proceedings: SPIE 2000, Volume 3999, pgs. 1009-1018.