Improved Cross-link-able Polymeric Binders for 193nm bottom Anti-reflective Coatings (BARC).

Oct 18, 2005

Authors: Jim Meador, Xie Shao, Mandar Bhave, Chris Cox, John Thompson, Debra Thomas, Stephen Gibbons, Ashley Farnsworth, and Michael Rich. Proceedings: SPIE 2001, Volume 4345, pgs. 846