193-nm Multilayer Imaging System.

Oct 18, 2005

Authors: J.D. Meador, Douglas Holmes, William DiMenna, Mariya Nagatkina, Michael D. Rich, Tony D. Flaim, W. Randall Bennett - Brewer Science, Ichiro Kobayashi - Nissan Chemicals Industries, Ltd., Japan. Proceedings: SPIE 2003, Volume X, pgs. X. Paper# ML5039-109.