Optimization of the planarizing performance of a DUV organic bottom antireflective coating for via first dual-damascene process:cooperation to achieve material and process characterization.
Oct 18, 2005
Authors: Paul Williams, Alice Martin, Marlene Strobl, William R. Roberts, Francis G. Goodwin, Lars Voelkel, Axel Feicke, Sean Trautman, James E. Lamb. Proceedings: SPIE 2000, Volume 4226, pgs. 160-168.