Development of Full-fill bottom anti-reflective coatings for Dual Damascene Process.

Oct 18, 2005

Authors: Yubao Wang, Xiaoming Wu, Xie Shao, Jim Lamb, John Sullivan, James Claypool, Rama Pulligadda, Bryan Spaul, Jackie Backus, Sean Trautman, and Gu Xu Proceedings: SPIE 2001, Volume 4345, pgs. 838-XXX.