News Articles

Developer Soluble Organic BARCs for KrF lithography.

Authors: Christian Cox, William J. Simmons, Debra L. Thomas, Craig L. Ghelli, P.R. Valerio, Alice Guerrero. Proceedings: SPIE 2003, Volume: X. Pages: X, Paper# ML5039-101.

string(43) "Smarty error: eval: missing 'var' parameter"