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Wet-Developable Organic Anti-Reflective Coatings For Implant Layer Applications.

Authors: Xie Shao,* Alice Guerrero,* and Yiming Gu** *Brewer Science, Inc., 2401 Brewer Drive, Rolla, MO 65401 USA **Integrated Device Technology Inc., R&D Center, 3131 NE Brookwood Pkwy., Hillsboro, OR 97124 USA Proceedings: SEMICON China 2004 SEMI Technology Symposium on March 17, 2004, at the RiverFront Business Hotel, Pudong, Shanghai.

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