Wet-Developable Organic Anti-Reflective Coatings For Implant Layer Applications.

Oct 18, 2005

Authors: Xie Shao,* Alice Guerrero,* and Yiming Gu** *Brewer Science, Inc., 2401 Brewer Drive, Rolla, MO 65401 USA **Integrated Device Technology Inc., R&D Center, 3131 NE Brookwood Pkwy., Hillsboro, OR 97124 USA Proceedings: SEMICON China 2004 SEMI Technology Symposium on March 17, 2004, at the RiverFront Business Hotel, Pudong, Shanghai.