Investigation of BARC-Resist Interfacial Interactions.

Oct 18, 2005

Authors: Chelladurai Devadoss, Yubao Wang, Rama Puligadda - Brewer Science, Eric K Lin, Joe L Lenhart, Wen-Li Wu - NIST, Gaithersburg, MD Proceedings: SPIE 2003, Volume: X, pgs. X, Paper# ML5040-82.