News Articles

Investigation of BARC-Resist Interfacial Interactions.

Authors: Chelladurai Devadoss, Yubao Wang, Rama Puligadda - Brewer Science, Eric K Lin, Joe L Lenhart, Wen-Li Wu - NIST, Gaithersburg, MD Proceedings: SPIE 2003, Volume: X, pgs. X, Paper# ML5040-82.

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