Spin-On Anti-Reflective Coating Defect Reduction by Proper Filter Selection and Process Optimization.

Oct 18, 2005

Authors: Nicholas L. Brakensiek - Brewer Science, Brian Kidd - Intergrated Designs, LP, Michael Mesawich, Dr. Barry Gotlinsky, and D Stevens - Pall Corporation Proceedings: SPIE 2003, Volume X, pgs. X. Paper# ML5039-98.