Apogee™ Spin Coater

with Datastream Technology

The Cee® ApogeeTM precision spin coater delivers track-quality performance with revolutionary interface capabilities and the utmost in chemical compatibility in an ef cient, space-saving design.

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Spinner dsBenefits

  • New, compact design for minimized footprint
  • Full-color, 7-inch touch screen display
  • High-density polyethylene (HDPE) spin bowl for maximum chemical compatibility
  • Durable benchtop design that can be converted to a flange-/deck-mountable configuration (mountable in the Cee® X-Pro II workstation)
  • DataStream technology as the standard interface

Dimensions

  • 13.25” (33.65 cm) W × 19” (48.26 cm) D × 12” (30.48 cm) H
  • Machine weight: 40 lb (18.14 kg)
  • Shipping weight: 100 lb (45.36 kg)

Programmability

  • Touch screen interface and display
  • Full-color alphanumeric-capable graphical user interface (GUI)
  • A virtually unlimited number of user-de ned recipe program steps
  • 0.1-second resolution for step times (9,999.9 seconds maximum step time)
  • Spin speed: 0 to 6,000 rpm (12,000 rpm option at no charge)
  • Spin speed acceleration:
    • 0 to 30,000 rpm/s unloaded
    • 0 to 23,000 rpm/s with a 200-mm substrate
    • 0 to 3,000 rpm/s with a 6” × 6” × 0.250” photomask in a recessed chuck
  • Connectivity: USB/Ethernet port for communications for uploading/downloading process parameters with DataStream™ technology
  • Simultaneous dual automated dispense capability
  • In-process/dynamic speed/acceleration control

Precision

  • Spin speed repeatability: < 0.2 rpm
  • Spin speed resolution: < 0.2 rpm
  • Substrate sizes: < 1 cm to 200 mm round; 7” x 7” square

Reliability

  • Indirect drive system protects the spin motor from contact with process chemicals and solvents
  • Vacuum and lid interlock
  • Industry-leading reliability and uptime
  • 1-year full warranty on parts and labor
  • Free remote technical support (phone, email, fax) for the life of the product
  • Application process assistance for life of the product www.brewerscience.com

Bowl Design

  • High-density polyethylene (HDPE) spin bowl for material compatibility
  • Optional stainless or Te on®-coated steel bowl (for all- stainless-steel construction)
  • Optional polyethylene disposable liners available
  • Versatile lid design allows process flexibility and repeatability
  • Optional nitrogen purge for an inert spin environment
  • Integrated drain and exhaust ports

Utilities

  • Voltage ranges: 100-125, 208-240 VAC, 50/60 Hz • Power requirements: 655 watts
  • Drain port: 3⁄4” OD
  • Exhaust port: 1” OD
  • Vacuum: 20 to 25” Hg
  • Exhaust: 20 to 50 cfm at 0.2” water
  • Nitrogen or CDA (for automated dispense): 70 psi