BSI

ARCŪ Applications

ARCŪ Applications Center

The table below contains specific information about the current ARCŪ brand products offered by Brewer Science and their features. Although this is not a comprehensive listing of all attributes, the list is designed to provide enough information to give you a sense of product capability. More information can be gathered from the other pages within this website or by contacting Brewer Science directly. Contact information is provided on the bottom of this page.



193nm Products

Resolution (nm)

Patterning Process

Topography Coverage

Possible Applications

Gate

Contact

STI

Via Printing

Via Fill

ARCŪ28

<110

Dry

Planar

Yes

Yes

-

-

-

ARCŪ29A

<110

Dry

Planar

Yes

Yes

Yes

Yes

Yes

ARCŪ66

<110

Dry

Planar

-

Yes

-

Yes

-

ARCŪ82A

<100

Dry

Planar

Yes

Yes

Yes

Yes

Yes


248nm Products

Resolution (nm)

Patterning Process

Topography Coverage

Gate

Contact

STI

Via Printing

Via Fill

DUV112

≤100

Dry

Planar

Yes

Yes

Yes

Yes

-

DUV64

<150

Dry

Conformal

Yes

Yes

Yes

Yes

-

DUV54

<150

Dry

Planar

Yes

Yes

Yes

Yes

Yes

DUV52

<150

Dry

Planar

Yes

Yes

Yes

Yes

Yes

DUV44

<150

Dry

Conformal

Yes

Yes

Yes

Yes

-

DUV42P

<100

Dry

Conformal

Yes

Yes

Yes

Yes

-

365nm Products

Resolution (nm)

Patterning Process

Topography Coverage

Gate

Contact

Via Printing

Implant

Lift-Off

ARCŪi-Con

>250

Dry

Conformal

Yes

Yes

Yes

Yes

-

XHRiC

>250

Dry

Planar

Yes

Yes

Yes

-

-

WiDEŪB

>250

Wet Develop

Yes

Yes

Yes

Yes

Yes

Would you like more information about an application for ARCŪ products? Click here to fill out an inquiry form or call +573.364.0300 (USA) to talk directly to a technical representative.


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