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Dry Etch ARC® Coatings

Brewer Science® dry-etch ARC® coatings are designed to maximize resolution and enable feature sizes across multiple photoresist platforms that would otherwise not be possible without costly capital investments. Dry-etch ARC® coatings are designed to provide custom-tailored optical constants for ideal reflectivity on a multitude of substrates. Dry-etch ARC® coatings are also designed for ultra-low outgassing to minimize tool down time due to cleaning and maintenance.

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