GenARC® 365 Coating

GenARC® 365 anti-reflective coating (BARC) provides optimal CD control for i-line applications


  • Achieve optimum CD control by planarizing shallow topography for i-line LOCOS applications
  • Conserve photoresist etch budget with a fast etching BARC
  • Increase flexibility in photoresist selection with broad resist compatibility
  • Extend use life of i-line lithography tools


Process Throughput Improvements

Reduce Exposure Time:

  • GenARC® 365 coating is compatible with advance resist that can be patterned at low exposure dose

Reduce Spin Time:

  • Good coat quality is achieved with a 30 second spin application versus 60 seconds for other materials

Reduce Bake/Spin Time:

  • Bake time can be reduced to 30 seconds without an increase in the strip process

GenARC® 365 Coat Coverage


GenARC



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