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OptiStack® Systems

Brewer Science® OptiStack® systems are industry proven lithography solutions designed to save you time and money and increase return on your lithography investment.

OptiStack® materials are paired with Brewer Science’s proprietary OptiStack® modeling capabilities to provide customized solutions for your lithography needs. With the ability to be used in advanced lithography integration schemes, the OptiStack® system is the leading choice for sub–20 nm processing and delaying the implementation of costly EUV processes.

Brewer Science® OptiStack® systems offer:

  • Universal applicability to any substrate.
  • Elimination of topography dispersion and underlying substrate optical constants from the optical proximity correction (OPC) equation to give the same reflectivity regardless of the substrate.
  • Extended lithography tool life — Implement thin resist technology, which allows for maximum resolution using existing ArF or KrF scanners.
  • Improved inventory and processing efficiency — Use the systems for a variety of layers at ArF and KrF wavelengths.
  • Flexibility — Use OptiStack® pattern transfer layer (PTL) material, which has customizable n and k values, to replace existing multilayer processes or to optimize a process for new nodes.
Technician holding a thinned wafer

OptiStack® System 1: FEOL Processing

  • OptiStack® HM800 material series over OptiStack® SOC110D material offers reworkability of the silicon hardmask layer while minimizing damage to the underlying high carbon layer.
  • System 1 has been proven to be compatible with double-patterning schemes.

OptiStack® System 2: BEOL and Implant Processing

  • OptiStack® HM800 material series over OptiStack® SOC300 material series are easily removable in commercial strippers and with common wet cleaning methods.
  • System 2 increases yield for BEOL processes.
  • This system also extends use of lithography tools for implant processes.

OptiStack® Stack Modeling Service

Customizes BARC material for customer stack and reduce experimental time and cost with OptiStack® Stack Modeling Service

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