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All 193nm ARCŪ products are PFOS Free, for your health and the safety of the environment.
The 193nm reduced feature sizes challenge is being met with our newest line of anti-reflective coatings, designed to meet the emerging needs of the 193nm photo process.
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All 193nm ARCŪ products are PFOS Free, for your health and the safety of the environment.
ARCŪ160 - Avoid unscheduled maintenance of your coat/bake module by reducing out-gassing during BARC bake by making ARCŪ160 your fast-etch process of record.
ARCŪ93 combines the latest in technology to offer the ArF photolithographer a fast etching BARC with broad photoresist compatibility and low outgassing during bake. This material is designed for gate, contact and via fill applications.
ARCŪ82A is a leading edge 193nm anti-reflective coating designed for improved depth of focus with advanced ArF photoresist. This 2nd minimum BARC is compatible with Fuji Film, JSR, Sumitomo, and TOK photoresist.
ARCŪ66 is Fuji Film, JSR and TOK photoresist compatible. Designed for use on hard-mask processes.
ARCŪ29A is a leading anti-reflective coating for 193nm photolithography. This 2nd minimum material is compatible with a broad range of ArF photoresist. It is available in formulations for 200 & 300mm process.
Product |
n |
k |
Cauchy A |
Cauchy B |
Cauchy C |
ARCŪ160 |
1.79 |
0.30 |
1.47 |
0.0144 |
0.0 |
ARCŪ93 |
1.84 |
0.38 |
1.52 |
1.65E-02 |
6.90E-04 |
ARCŪ91 |
1.69 |
0.55 |
1.518 |
8.67E-03 |
0.00 |
ARCŪ82A |
1.65 |
0.54 |
1.59 |
6.40E-03 |
0.00 |
ARCŪ66 |
1.82 |
0.25 |
1.55 |
9.0E-03 |
0.00 |
ARCŪ29A |
1.82 |
0.34 |
1.52 |
5.10E-03 |
0.00 |
Product | ARCŪ160 | ARCŪ93 | ARCŪ91 | ARCŪ82A | ARCŪ66 | ARCŪ29A |
FujiFilm | GAR8105G1 | GAR8105G1 | GAR8105G1 | GAR8105G1 | GAR8105G1 | |
JSR | AR1682J | AR1682J | AR1682J | AR1682J | AR1682J | AR1682J |
ShinEtsu | SAIL-X123 | SAIL-X108 | ||||
Sumitomo | AJ5867 | PAR-817, PAR811 | ||||
TOK | P-6111 | P-6111 | P-6111 | P-6111 | P-6111 |
Would you like more information about 193nm ARCŪ products? Click here to fill out an inquiry form or call 573.364.0300 (US) to talk directly to a technical representative.