Cee® Model 10 Bake Plate

The Cee® Model 10 bake plate provides the user with repeatable thermal performance in a robust system design for years of reliable operation.

Data Sheet Contact Us

The Brewer Science Cee® Model 10 bake plate is designed for process and R&D engineers requiring a bake plate for largearea substrate applications. The Cee® Model 10 bake plate has capability for 300-mm or 14-in square (maximum) substrates. This bake plate provides the user with repeatable thermal performance in a robust system designed for years of reliable operation.

Operation

  • Pneumatic lift pin option (load/unload) standard
  • Removable fixed proximity standoffs (0.006” standard)
  • Contact or fixed proximity bake methods (standard)
  • Optional vacuum and proximity bake for 200- and 300-mm wafers
  • Optional custom bake plate surfaces available upon request

Programmability

  • Dual 4-digit alphanumeric LED display
  • Full PID operation
  • Temperature auto-tuning capable
  • Security: password protection available at no charge
  • Optional ramping capability (8 specific set points)

Precision

  • Substrate Sizes: < 1cm to 300 mm round; 14 in x 14 in square
  • Temperature Resolution: 0.1°C
  • Temperature Range: ambient to 300°C (400°C optional)
  • Temperature Uniformity: ± 0.3% across working surface

Reliability

  • Industry-leading reliability and uptime
  • 1-year full warranty on parts and labor
  • Free remote technical support (phone, email, fax) for life of the product
  • Application process assistance for life of the product