The Cee^® 200FX spin coater combines extremely accurate spin speed repeatability/resolution with high horsepower drive for aggressive acceleration capabilities. These features ensure the elimination of process variables for a large array of process chemicals and applications. The Cee^® 200FX has state-of-the-art programmability and has been designed specifically for 300- to 450-mm wafers and large LCD squares up to 14" × 14".

Programmability

• Alphanumeric-capable graphical user interface (GUI)
• User-friendly touch screen interface and display
• 700 spin process programs
• 20 steps per spin program (upgradeable with software option)
• 0.1-second resolution for step times (time: 0 to 999.9 sec/step)
• Spin speed: 0 to 3,000 rpm (optional 6,000 rpm)
• Spin speed acceleration:
  • 0 to 30,000 rpm/sec unloaded
  • 0 to 20,000 rpm/sec 300-mm substrate
  • 0 to 3,000 rpm/sec 300 mm × 6 mm round captive chuck
  • 0 to 400 rpm/sec 14" × 14" × 1.1 mm recessed chuck
• Programmable logic controller (PLC) system
• PC compatible: Ethernet port for communications for uploading/downloading process parameters standard
• Simultaneous dual automated dispense capability
• Security: Password protection option at no charge

Precision

• Spin speed repeatability: < 0.2 rpm
• Spin speed resolution: < 0.2 rpm
• Substrate sizes: Maximum 450 mm round; 14" × 14" square

Reliability

• Indirect drive system protects the spin motor from accidental contact with
  process chemicals and solvents
• Vacuum and lid interlock standard
• Industry-leading reliability and up-time
• 1-year full warranty for parts and labor
• Free technical phone support for the life of the product
• Application process assistance for life of the product

Bowl Design

• All stainless steel construction
• ETFE-coated spin bowl optional for material compatibility
• Optional polyethylene/Teflon^® splash ring
• Drain and exhaust ports located in bottom of bowl
• Optional nitrogen purge for an inert spin environment

Dimensions

• Machine weight: 55 lb (25 kg)
• Shipping weight: 160 lb (72.6 kg)
• Cabinet dimensions: 36" L × 27.75" W × 14.25" H (91.5 cm × 70.5 cm × 36.2 cm)

Utilities

• Power requirements: 200 to 240 VAC / single phase / 1350 watts / 7.0 amp
• Drain port: 1" OD
• Exhaust port: 1.5" OD
• Vacuum: 25"/Hg
• Exhaust: 50 cfm Nitrogen or CDA (for automatic dispense): 70 psi