Cee® 11Large-Area Bake Plate
The Brewer Science Cee® Model 11 bake plate is specifically designed for large area substrates, up to 450-mm round and 20-in square. It provides process and R&D engineers with the utmost in thermal accuracy and uniformity. The footprint is compact, so it installs seamlessly within existing clean room hoods or on laboratory table surfaces.
Operation
- Pneumatic lift pin (load/unload) standard
- Removable fixed proximity standoffs (0.006” standard)
- Contact or fixed proximity bake methods (standard)
- Optional vacuum and proximity bake for 300- and 450-mm wafers
- Optional custom bake plate surfaces available upon request
Programmability
- Dual 4-digit alphanumeric LED display
- Full PID operation
- Temperature auto-tuning capable
- Security: password protection option at no charge
- Optional ramping capability (8 specific set points)
Precision
- Maximum Substrate Sizes: < 1cm to 450-mm round; 20” × 20” square
- Temperature Resolution: 0.1°C
- Temperature Range: ambient to 200°C (250°C optional)
- Temperature Uniformity: ± 0.3% across working surface
Dimensions
- Machine Weight: 150 lb
- Shipping Weight: 280 lb
- Cabinet Dimensions: 24.938 in L × 24.938 in W × 9.5 in H
Reliability
- Industry-leading reliability and uptime
- 1-year full warranty on parts and labor
- Free remote technical support (phone, email, fax) for the life of the product
- Application process assistance for life of the product
Exhaust Bake Hood Design
- All stainless steel construction
- Optional exhausted hood for removal of process chemicals
- Optional nitrogen purge for inert bake environment
Utilities
- Power requirements: 208 to 240 volts AC, 2351-3130 watts
- Full load current: 12.5 to 15.5 amps
- Input breaker/fuse: 20 amps
- Optional exhausted lid port: 2-inch OD
- Optional exhausted lid: 10- to 30-cfm range