Cee®200 Spin Coater

 

Fully programmable and user-friendly, the Cee^® 200 precision spin coater features the accuracy and repeatability needed to eliminate processing variability from critical experiments. Convenient, portable and durable, this easy-to-use benchtop system will provide years of high-performance operation, making the Cee^® 200 spin coater purchase a smart and cost-effective decision.

 

 

 

 

 

• Alpha-numeric capable GUI (Graphical User Interface)
• User-friendly touch screen interface and display
• 700 process programs
• 20 steps per program (Upgradeable with software option)
• 0.1 second resolution for step times
• Spin speed 0 - 6,000 rpm (12,000 rpm option at no charge)
• Spin speed acceleration:
  
  • 0 - 30,000 rpm/sec unloaded
  • 0 - 23,000 rpm/sec with 200 mm SI wafer
  • 0 - 3,000 rpm/sec 6" by 6" by .250" photomask recessed chuck
• Programmable logic controller (PLC) system controller
• PC Compatible: Ethernet port for communications for uploading/downloading process parameters standard
• Simultaneous dual automated dispense capability
• Security: Password protection (option at no charge)

• Spin Speed Repeatability:  < 0.2 rpm
• Spin Speed Resolution:  < 0.2 rpm
• Substrate Sizes (<1 cm - 200 mm round / 6" by 6" square)

• Indirect drive system protects the spin motor from accidental contact with process chemicals and solvents
• Vacuum and lid interlock standard
• Exceptional reliability and up-time
• 1 year full warranty parts and labor
• Free technical phone support for the life of the product
• Application process assistance for life of the product

• All stainless steel construction
• ETFE coated spin bowl and drain system optional for material compatibilty
• Optional polyethylene liners available
• Optional polyethylene/Teflon^® splash ring
• Closed and optional vented lid designs for process flexibility
• Drain and exhaust ports located in the bottom of the bowl
• Optional Nitrogen purge for inert spin environment

• Machine weight: 40 lbs.
• Shipping weight: 106 lbs.
• Cabinet dimensions: 24”L x 13”D x 13”H

• Voltage ranges:  100, 110-125, 208-240 VAC, 50/60 Hz
• Power requirements:  655 watts
• Drain port:  3⁄4” OD
• Exhaust port:  1” OD
• Vacuum:  25” Hg
• Exhaust:  50 cfm at 0.2” water
• Nitrogen or CDA (for automatic dispense):  70 psi

The Cee® 200 spin coater is available in a flange mount for wet bench installations. Please click here for further information.

Brewer Science offers both spray and puddle dispense options on the Cee^® Model 200.   These dispense methods are normally used in conjunction with a pressure can dispense which holds the developer. Please click here to view further details.

Brewer Science welcomes the opportunity to provide quality solutions for your specific application. Please contact us by email or call +573.364.0300 (US).  Our support staff will promptly respond to your request.