- Developer: Brewer Science offers both spray and puddle dispense options on the Cee® Model 200. These dispense methods are normally used in conjunction with a pressure can dispense which holds the developer.
- Spray Developer Option: Utilizes two spray nozzles to apply
developer solution and deionized (DI) water. The spray developer option
uses an open UHMW lid with spray nozzles mounted outside the wafer
plane, spraying inward from the center of the wafer out.
- This unit uses 1-gallon pressure cans as the reservoirs for the solutions.
- A maximum of four spray nozzles can be used to apply developer solution and DI water
- This option can be configured to accommodate up to four center-puddle dispenses
- DI Water Rinse: Brewer Science offers both topside and backside
DI water rinse options. This dispense method is normally used in
conjunction with a pressure can dispense or by using a house DI water
supply.
- 200DB Option: Available with integrated hot plate for post-exposure bake (PEB applications).
Brewer Science Cee® 200 Spray and
Puddle Developer |
- Alphanumeric-capable graphical user interface (GUI)
- User-friendly touch screen interface and display
- 700 process programs
- 20 steps per program (upgradable with software option)
- 0.1-second resolution for step times
- Spin speed: 0 to 6,000 rpm (12,000 rpm option at no charge)
- Spin speed acceleration, heavy duty spin motor (200 watts continuous/800 watts peak)
- 0 to 30,000 rpm/sec unloaded
- 0 to 23,000 rpm/sec for a 200 mm substrate
- 0 to 3,000 rpm/sec for a 6" x 6" x .250" photomask recessed chuck
- PLC controlled
- PC compatible: Ethernet port for uploading/downloading process parameters standard
- Simultaneous dual automated dispense capability
- Security: Password protection option at no charge
- Spin speed repeatability: < 0.2 rpm
- Spin speed resolution: < 0.2 rpm
- Substrate sizes (< 1 cm to 200 mm round / 6" x 6” square)
Reliability
- Indirect drive system protects the spin motor from accidental contact with process chemicals and solvents
- Vacuum and lid interlock standard
- Industry-leading reliability and up-time
- 1-year full warranty for parts and labor
- Free technical phone support for the life of the product
- Application process assistance for life of the product
Bowl Design
- All stainless steel construction
- ETFE-coated spin bowl option for material compatibility
- Optional polyethylene liners available
- Optional polyethylene/Teflon® splash ring closed and optional open lid designs for process flexibility
- Drain and exhaust ports located in the bottom of the bowl
- Optional nitrogen purge for an inert spin environment
- Machine weight: 40 lbs.
- Shipping weight: 106 lbs.
- Cabinet dimensions: 24”L x 13”D x 13”H
The Brewer Science Cee® 200 Spray and Puddle Developer is available as a benchtop coater (Cee®200 Spin Coater) or as a combination coat-bake system (Cee® 200 CB Coater-Bake Plate).
Brewer Science welcomes the opportunity to provide quality solutions for your specific application. Please contact us by email or call +573.364.0300 (US). Our support staff will promptly respond to your request.
