Dimensions of Compact Wet Bench Design

• Spin module: 14"L × 14"D × 16"H (35.56 cm × 35.56 cm × 40.64 cm)
• Bake module: 12.875"L × 12.875"D × 15.75"H (32.7 cm × 32.7 cm × 40 cm)
• Remote keypad, optional: 8.28"L × 7.5"D × 7.5"H (21 cm × 19 cm × 19 cm)
• Optional face mount stationary: 7.5"L × 7"D × 2.75"H (19 cm × 17.78 cm × 7 cm)
• Machine weight: 165 lb (75 kg)
• Ship weight: 250 lb (113 kg)
• Also available in standalone Cee® 200FL spinner or standalone Cee® 1300FL bake unit

Programmability

• Alphanumeric-capable graphical user interface (GUI)
• User-friendly touch screen interface and display
• 700 process programs
• 20 steps per program (upgradable with software option)
• 0.1-second resolution for step times (0 to 999.9 sec/step)
• Spin speed: 0 to 6,000 rpm (12,000 rpm option at no charge)
• Spin speed acceleration
  
  • 0 to 30,000 rpm/sec unloaded
  • 0 to 23,000 rpm/sec for a 200 mm substrate
  • 0 to 3,000 rpm/sec for a 6" × 6" × .250" photomask recessed chuck
• Three automated bake methods (contact, vacuum and proximity)
• Bake plate auto-sizing for 3", 100 mm, 125 mm, 150 mm, 200 mm
• Temperature data recording standard
• PC compatible: Ethernet port for uploading/downloading process
  parameters standard
• Simultaneous dual automated dispense capability
• Security: Password protection option at no charge

Precision

• Spin speed repeatability: < 0.2 rpm
• Spin speed resolution: < 0.2 rpm
• Substrate sizes (< 1 cm to 200 mm round / 6" × 6" square)
• Temperature resolution: 0.1°C
• Temperature range: Ambient to 300°C (400°C optional)
• Temperature uniformity: 0.3% across working surface

Reliability

• Indirect drive system protects the spin motor from accidental contact with process chemicals and solvents
• Vacuum and lid interlock standard
• Industry-leading reliability and up-time
• 1-year full warranty for parts and labor
• Free technical phone support for the life of the product
• Application process assistance for life of the product

Bowl Design

• Stainless steel construction
• ETFE-coated spin bowl option for material compatibility
• Optional polyethylene liners available
• Optional polyethylene/Teflon® splash ring
• Closed and optional open lid designs for process flexibility
• Drain and exhaust ports located in the bottom of the bowl
• Optional nitrogen purge for an inert spin environment
• Exhaust hood for removal of process chemicals
• Optional nitrogen purge for inert bake environment

Benchtop Coater and Coat-Bake System Available

The Brewer Science Cee^® 200 Spray and Puddle Developer is available as a benchtop or as a combination Coat-Bake System.