- Spin module: 14"L x 14"D x 16"H (35.56 cm x 35.56 cm x 40.64 cm)
- Bake module: 12.875"L x 12.875"D x 15.75"H (32.7 cm x 32.7 cm x 40 cm)
- Remote keypad, optional: 8.28"L x 7.5"D x 7.5"H (21 cm x 19 cm x 19 cm)
- Optional face mount stationary: <br>7.5"L x 7"D x 2.75"H (19 cm x 17.78 cm x 7 cm)
- Machine weight: 165 lb (75 kg)
- Ship weight: 250 lb (113 kg)
- Also available in standalone CeeŽ 200FL spinner or standalone CeeŽ 1300FL bake unit
- Alphanumeric-capable graphical user interface (GUI)
- User-friendly touch screen interface and display
- 700 process programs
- 20 steps per program (upgradable with software option)
- 0.1-second resolution for step times (0 to 999.9 sec/step)
- Spin speed: 0 to 6,000 rpm (12,000 rpm option at no charge)
- Spin speed acceleration
- 0 to 30,000 rpm/sec unloaded
- 0 to 23,000 rpm/sec for a 200 mm substrate
- 0 to 3,000 rpm/sec for a 6" x 6" x .250" photomask recessed chuck
- Three automated bake methods (contact, vacuum and proximity)
- Bake plate auto-sizing for 3", 100 mm, 125 mm, 150 mm, 200 mm
- Temperature data recording standard
- PC compatible: Ethernet port for uploading/downloading process
parameters standard - Simultaneous dual automated dispense capability
- Security: Password protection option at no charge
- Spin speed repeatability: < 0.2 rpm
- Spin speed resolution: < 0.2 rpm
- Substrate sizes (< 1 cm to 200 mm round / 6" x 6" square)
- Temperature resolution: 0.1°C
- Temperature range: Ambient to 300°C (400°C optional)
- Temperature uniformity: 0.3% across working surface
- Indirect drive system protects the spin motor from accidental contact with process chemicals and solvents
- Vacuum and lid interlock standard
- Industry-leading reliability and up-time
- 1-year full warranty for parts and labor
- Free technical phone support for the life of the product
- Application process assistance for life of the product
- Stainless steel construction
- ETFE-coated spin bowl option for material compatibility
- Optional polyethylene liners available
- Optional polyethylene/TeflonŽ splash ring
- Closed and optional open lid designs for process flexibility
- Drain and exhaust ports located in the bottom of the bowl
- Optional nitrogen purge for an inert spin environment
- Exhaust hood for removal of process chemicals
- Optional nitrogen purge for inert bake environment
The Brewer Science CeeŽ 200 Spray and Puddle Developer is available as a benchtop coater (CeeŽ200 Spin Coater) or as a combination coat-bake system (CeeŽ 200 CB Coater-Bake Plate).
Brewer Science welcomes the opportunity to provide quality solutions for your specific application. Please contact us by email or call +573.364.0300 (US). Our support staff will promptly respond to your request.
