Cee® 200CBXPrecision Coat-Bake System
The Brewer Science® Cee® 200CBX precision coat-bake system combines a track quality precision spin coater with a high uniformity bake plate, in an efficient space saving design.
Benefits
- Onboard Windows®-based PC control for enhanced interface capabilities and connectivity
- New compact design for minimized footprint
- Full-color, 7-inch touch screen display
- Teflon® spin bowl for maximum chemical compatibility
- Simultaneous operation and monitoring for both the coat and bake modules
Specifications
Dimensions
- 28" W x 19" D x 12" H (71.1 cm W x 48.3 cm D x 30.5 cm D)
- Machine Weight: 165 lb (74.8 kg)
- Shipping Weight: 250 lb (113.4 kg)
Programmability
- Controlled by onboard Windows®-based PC
- Touch screen interface and display
- Ethernet port for network connectivity and uploading/downloading process parameters
- 250,000 process programs onboard
- Virtually unlimited steps per program
- 0.1-s resolution for step times with a range of
- 0 to 9,999.9 s/step
- Energy-saving capability (for predetermined temperature output control)
- Security: password protection available at no charge
- Three automated bake methods: contact, vacuum, proximity
- Bake plate auto sizing for 3-inch, 100-, 125-, 150-, and 200-mm substrates
- Temperature data recording
- Optional electronic lift pins (replace N2 proximity for loading/unloading substrates from bake module). Program 1000 specific proximity heights above the surface in any sequence or combination. Height is programmed in 0.001-inch increments with an overall range of 0.000 to 0.750 inches.
- Ramping capability optional (8 specific set points within a single bake recipe)
- Spin speed: 0 to 6,000 rpm (12,000 rpm option at no charge; 16,000 rpm option available)
- Spin speed acceleration:
0 to 30,000 rpm/s unloaded
0 to 23,000 rpm/s for 200-mm substrate
0 to 3,000 rpm/s for 6" x 6" x 0.25" photomask recessed chuck - System capable of controlling third-party host software for high-end IDI/Cybor/Mykrolis positive displacement pumps
- Simultaneous dual automated dispense capability
- Bidirectional speed control/oscillating chuck
- Iteration software (recipe looping)
- Dispense or component outputs: 50
- In-process/dynamic speed/acceleration control
Precision
- Spin speed repeatability: within < 0.2 rpm
- Spin speed resolution: within < 0.2 rpm
- Substrate sizes: < 1 cm to 200 mm round; 7" x 7" square)
- Temperature resolution: ± 0.1°C
- Temperature range: ambient to 300°C (400°C optional)
- Temperature uniformity: 0.3% across working surface
Reliability
- Indirect drive system protects the spin motor from contact with process chemicals and solvents
- Vacuum and lid interlock
- Exceptional reliability and uptime
- 1-year full warranty on parts and labor
- Free remote technical support (phone, email, fax) for the life of the product
- Application process assistance for life of the product
- Bowl & Exhaust Hood Design
- All stainless steel construction
- Teflon® spin bowl for material compatibility
- Integrated bowl ring to eliminate material migration
- Optional stainless steel bowl (for all-stainless-steel construction)
- Optional polyethylene bowl (educational package) available
- Optional polyethylene liners available
- Optional polyethylene/Teflon® splash ring
- Closed and optional open lid designs for process flexibility
- Drain and exhaust ports located in the bottom of bowl
- Exhausted hood for removal of process chemicals
- Optional nitrogen purge for inert spin/bake environment
Utilities
- Voltage ranges: 100, 110-125, 208-240 VAC, 50/60 Hz
- Power requirements: 1793 watts (16 amps)
- Drain Port: 0.75 inch OD
- Exhaust Port: 1" OD
- Vacuum: 20 to 25 inches Hg
- Bowl Exhaust: 20 to 50 cfm
- Bake Plate Exhaust: 1" OD; 5 to 10 cfm
- Nitrogen or CDA (for automated dispenses): 70 psi