The Cee^® 200X precision spin coater delivers track-quality performance, with revolutionary interface capabilities and the utmost in chemical compatibility, in an efficient, space-saving design.

Fully programmable and user-friendly, the Brewer Science^® Cee^® 200X precision spin coater features the accuracy and repeatability needed to eliminate processing variability from critical experiments. With its convenient compact footprint, wide array of chemical compatibility, and durability, this easy-to-use benchtop system will provide years of high-performance operation, making the Cee^® 200X purchase a smart and cost-effective decision. 250X

Benefits

• PC control for enhanced interface capabilities and connectivity
• New, compact design for minimized footprint
• Full-color, 7-inch touch screen display
• Teflon^®/polyethylene spin bowl for maximum chemical compatibility
• Durable wet-bench design that is deck mountable

Programmability

• PC-controlled
• Touch screen interface and display
• Full-color alphanumeric-capable graphical user interface (GUI)
• 250,000 process recipe programs on board
• A virtually unlimited number of user-defined recipe program steps
• 0.1-second resolution for step times (9,999.9 seconds maximum step time)
• Spin speed: 0 to 6,000 rpm (12,000 rpm option at no charge;
• 16,000 rpm option available)
• Spin speed acceleration:
• 0 to 30,000 rpm/s unloaded
• 0 to 23,000 rpm/s 200-mm substrate
• 0 to 3,000 rpm/s 6” × 6” × 0.250” photomask recessed chuck
• Connectivity: USB/ethernet port for communications for uploading/downloading process parameters with offline firmware standard (offline recipe number and steps unlimited)
• System capable of controlling third-party host software for high-end IDI/Cybor/Mykrolis positive displacement pumps
• Simultaneous dual automated dispense capability
• Bidirectional speed control/oscillating chuck
• Iteration software (recipe looping)
• Dispense or component outputs: 50
• Security: Password protection option available at no charge
• In-process/dynamic speed/acceleration control

Precision

• Spin speed repeatability: < 0.2 rpm
• Spin speed resolution: < 0.2 rpm
• Substrate sizes: < 1 cm to 200 mm round; 7” × 7” square

Reliability

• Indirect drive system protects the spin motor from contact with process chemicals and solvents
• Vacuum and lid interlock
• Industry-leading reliability and uptime
• 1-year full warranty on parts and labor
• Free remote technical support (phone, email, fax) for the life of the product
• Application process assistance for life of the product

Bowl Design

• Teflon^® spin bowl for material compatibility
• Integrated bowl ring to eliminate material migration
• Optional stainless steel bowl (for all-stainless-steel construction)
• Optional polyethylene bowl (educational package) available
• Optional polyethylene liners available
• Optional polyethylene/Teflon^® splash ring
• Closed and optional open lid designs for process flexibility
• Drain and exhaust ports located in the bottom of bowl
• Optional nitrogen purge for an inert spin environment

Dimensions

• 13.25” (33.65 cm) W × 19” (48.26 cm) D × 12” (30.48 cm) H
• Machine weight: 40 lb (18.14 kg)
• Shipping weight: 100 lb (45.36 kg)

Utilities

• Voltage ranges: 100, 110-125, 208-240 VAC, 50/60 Hz
• Power requirements: 655 Watts
• Drain port: ¾” OD
• Exhaust port: 1” OD
• Vacuum: 20 to 25” Hg
• Exhaust: 20 to 50 cfm at 0.2” water
• Nitrogen or CDA (for automated dispense): 70 psi