The Cee® 200CB is a robust and high-performance coat-bake system capable of providing production performance in a small, benchtop package. With its convenient and user-friendly design, Cee® 200CB programs are easily entered, monitored, and stored through a newly enhanced graphical user interface. Small footprint, intuitive design, and unequalled experience add up to years of high-performance coat-bake processing, perfect for any low-volume or R&D laboratory processing environment.
Programmability
- Alpha Numeric Capable GUI (Graphical User Interface)
- User Friendly Touch Screen Interface and Display
- 700 Spin/Bake Process Programs
- 20 Steps per Spin Program (Upgradeable with Software Option)
- Bake Steps: 3 steps/program
- 0.1 Second Resolution for Step Times (Time: 0-999.9sec/step)
- Spin Speed 0-6,000 rpm (12,000 rpm Option/No Charge)
- Spin Speed Acceleration:
- 0-30,000 rpm/Sec Unloaded
- 0-23,000 rpm/Sec 200mm Substrate
- 0-3,000 RPM/Sec 6” × 6” × .250” Photomask w/ Recessed Chuck
- Three automated bake methods (contact, vacuum, & proximity)
- Bake Plate Auto Sizing for 3”, 100, 125, 150, 200mm
- Temperature Data Recording Standard
- Programmable Logic Controller (PLC) system controller
- PC Compatible: Ethernet Port for Communications for Uploading/Downloading Process Parameters Standard
- Simultaneous Dual Automated Dispense Capability
- Security: (Password Protection Option/ No Charge)
Precision
- Spin Speed Repeatability: < 0.2 rpm
- Spin Speed Resolution: < 0.2 rpm
- Substrate Sizes (<1cm – 200mm Round/ 6” × 6” Square)
- Temperature Resolution: 0.1° C
- Temperature Range: Ambient to 300° C (400° C Optional)
- Temperature Uniformity: 0.3% Across Working Surface
Reliability
- Indirect Drive System Protects the Spin Motor from Accidental Contact with Process Chemical and Solvents.
- Vacuum and Lid Interlock Standard
- Exceptional Reliability and Up-Time
- 1 Year Full Warranty Parts and Labor
- Free Technical Phone Support for the Life of the Product
- Application Process Assistance for Life of the Product
Bowl & Exhaust Hood Design
- All Stainless Steel Construction
- ETFE Coated Spin Bowl Optional for Material Compatibility
- Optional Polyethylene Liners Available
- Optional Polyethylene/ Teflon Splash Ring
- Closed and Optional Open Lid Designs for Process Flexibility
- Drain and Exhaust Ports Located in the Bottom of Bowl
- Optional Nitrogen Purge for an Inert Spin Environment
- Exhausted Hood for Removal of Process Chemicals
- Optional Nitrogen Purge for Inert Bake Environment
Dimensions
- Machine weight: 79 lbs.
- Shipping weight: 210 lbs.
- Cabinet dimensions: 38”L × 13”D × 13”H
Utilities
- Voltage ranges: 100, 110-125, 208-240 VAC, 50/60 Hz
- Power requirements: 1414, 1983, 1855 watts
- Drain port: 3⁄4" OD
- Spin exhaust port: 1" OD
- Bake exhaust port: 1" OD
- Vacuum: 25" Hg
- Exhaust: 50 cfm at 0.2" water
- Nitrogen or CDA (for automatic dispense): 70 psi
Flange Mount System
The Cee® 200 spin coater is available in a for wet bench installations.
Brewer Science Cee® 200 Spray and Puddle Developer
Brewer Science offers both options on the Cee® Model 200. These dispense methods are normally used in conjunction with a pressure can dispense which holds the developer.