The Brewer Science Cee® 10 hot plate is designed for process and R&D engineers requiring a hot plate for substrate applications. The Cee 10 hot plate has capability for 300 mm or 14"³ square (maximum) substrates. This provides the user with repeatable thermal performance in a robust system design for years of reliable operation.

Programmability

• Dual 4-digit alphanumeric LED display
• Full PID operation
• Temperature auto-tuning capable
• Security: Password protection option at no charge
• Ramping capability optional (8 specific set points)

Operation

• Pneumatic Lift pin Option (Load/Unload) Standard
• Removable Fixed Proximity Standoffs (.020" Standard)
• Contact or Fixed Proximity Bake Method Standard
• Vacuum and Proximity Bake for 200 and 300mm Wafers Optional
• Optional Custom Hot Plate Surfaces Available Upon Request

Precision

• Substrate sizes: 300 mm round, 14" x 14" square
• Temperature resolution: 0.1°C
• Temperature range: Ambient to 300°C (400°C optional)
• Temperature uniformity: ± 0.3% across working surface

Exhaust Bake Hood Design (Optional)

• All stainless steel construction
• Exhaust hood for removal of process chemicals
• Optional nitrogen purge for an inert bake environment

Dimensions

• Machine weight: 77 lb (35 kg)
• Shipping weight: 210 lb (95.5 kg)
• Cabinet dimensions: 18.75" W x 18.75" D x 9.5" H (47.7 cm W x 47.7 cm D x 24.2 mm H)

Utilities

• Power requirements: 208 to 240 volts A/C, 3005 to 4005 watts
• Full load current: 14.4 to 16.7 amps
• Input breaker/fuse: 20 amps
• Optional exhausted lid port: 2" OD
• Optional exhausted lid: 10 to 30 cfm range

Reliability

• Exceptional reliability and up-time
• 1-year full warranty parts and labor
• Free technical phone support for the life of the product
• Application process assistance for life of the product