The Brewer Science^® Cee^® 200FXD heavy-drive developer combines extremely accurate spin speed repeatability/resolution with a high-horsepower drive for aggressive acceleration capabilities. These features ensure the elimination of process variables for a large array of process chemicals and applications. The 200FXD developer has state-of-the-art programmability and has been designed specifically for 300-mm wafers and large LCD squares up to 14 in × 14 in.

Dispense Options

The Brewer Science^® Cee^® 200FXD heavy-drive developer is available with spray and puddle dispense options. These methods of dispense are normally used in conjunction with a pressure can dispense system.

Spray Dispense

The spray dispense option utilizes an open UHMW lid with spray nozzles mounted outside the wafer plane. The nozzles spray material inward from the center of the wafer out.

• Can accommodate up to four spray nozzles
• Can be configured to accommodate up to four center puddle dispenses

Puddle Dispense

The puddle dispense option utilizes a standard automated dispense spinner. Material is dispensed in a “puddle” on to the top of the substrate and spread across the surface with centrifugal force.

• Uses suckback dispense valves
• Minimizes material usage

DI Water Rinse

Topside and backside DI water rinse options are available. This method of dispense is normally used in conjunction with a pressure can dispense system or an in-house DI water supply.

Specifications

Programmability

• Alphanumeric-capable graphical user interface (GUI)
• User-friendly touch screen interface and display
• 700 spin process programs
• 20 steps per spin program (upgradeable with software option)
• 0.1-s resolution for step times (0 to 999.9 s/step)
• Spin speed: 0 to 3,000 rpm (6,000 rpm optional)
• Spin speed acceleration:
• 0 to 30,000 rpm/s unloaded
• 0 to 20,000 rpm/s 300-mm substrate
• 0 to 3,000 rpm/s 300-mm × 6-mm round; recessed chuck
• 0 to 400 rpm/s 14 in × 14 in × 1.1-mm; recessed chuck
• Programmable logic controller (PLC) system controller
• PC compatible: ethernet port for uploading/downloading process parameters standard
• Simultaneous dual automated dispense capability
• Security: password protection option available at no charge

Precision

• Spin speed repeatability: < 0.2 rpm
• Spin speed resolution: < 0.2 rpm
• Substrate sizes: 450 mm round; 14 in × 14 in square

Reliability

• Indirect drive system protects spin motor from contact with process chemical and solvents
• Vacuum and lid interlock standard
• Exceptional reliability and up-time
• 1-year full warranty (parts and labor)
• Free remote technical support (phone, email, fax) for the life of the product
• Application process assistance for the  life of the product

Bowl & Exhaust Hood Design

• All stainless steel construction
• ETFE-coated spin bowl optional for added material compatibility
• Optional polyethylene/Teflon^® splash ring*
• Drain and exhaust ports located in bottom of bowl
• Optional nitrogen blow-off for drying
• Optional automated drain separator

Dimensions

• 36 in (91.44 cm) D × 27.75 in (70.49 cm) W × 14.25 in (36.2 cm) H
• Machine weight: 55 lb (24.95 kg)
• Shipping weight: 160 lb (72.57 kg)

Utilities

• Power requirements: 208–240 V A/C, 1350 W, 7.0 A
• Drain port: 1 in OD
• Exhaust port: 1.5 in OD
• Recommended utilities:
• Vacuum: 25 in/hg
• Exhaust: 10–50 cfm
• Auto-dispense requirements: N2 or CDA: 70 psi
• DI water for developer spray and BSR (if hard plumbed)
• Max-flow 80-psi regulator to be supplied by customer

*Teflon^® is a registered trademark of E.I. du Pont de Nemours and Company.