Fully programmable and user-friendly, the Cee^® 200 precision spin coater features the accuracy and repeatability needed to eliminate processing variability from critical experiments. Convenient, portable and durable, this easy-to-use benchtop system will provide years of high-performance operation, making the Cee^® 200 spin coater purchase a smart and cost-effective decision.

Programmability

• Alpha-numeric capable GUI (Graphical User Interface)
• User-friendly touch screen interface and display
• 700 process programs
• 20 steps per program (Upgradeable with software option)
• 0.1 second resolution for step times
• Spin speed 0 - 6,000 rpm (12,000 rpm option at no charge)
• Spin speed acceleration:
  
  • 0 to 30,000 rpm/s unloaded
  • 0 to 23,000 rpm/s with 200 mm SI wafer
  • 0 to 3,000 rpm/s 6" × 6" × .250" photomask recessed chuck
• Programmable logic controller (PLC) system controller
• PC Compatible: Ethernet port for communications for uploading/downloading process parameters standard
• Simultaneous dual automated dispense capability
• Security: Password protection (option at no charge)

Precision

• Spin Speed Repeatability: < 0.2 rpm
• Spin Speed Resolution: < 0.2 rpm
• Substrate Sizes (<1 cm to 200 mm round; 6" × 6" square)

Reliability

• Indirect drive system protects the spin motor from accidental contact with process chemicals and solvents
• Vacuum and lid interlock standard
• Exceptional reliability and up-time
• 1 year full warranty parts and labor
• Free technical phone support for the life of the product
• Application process assistance for life of the product

Bowl Design

• All stainless steel construction
• ETFE coated spin bowl and drain system optional for material compatibilty
• Optional polyethylene liners available
• Optional polyethylene/Teflon^® splash ring
• Closed and optional vented lid designs for process flexibility
• Drain and exhaust ports located in the bottom of the bowl
• Optional Nitrogen purge for inert spin environment

Dimensions

• Machine weight: 40 lbs.
• Shipping weight: 106 lbs.
• Cabinet dimensions: 24”L × 13”D × 13”H

Utilities

• Voltage ranges: 100, 110-125, 208-240 VAC, 50/60 Hz
• Power requirements: 655 watts
• Drain port: 3⁄4” OD
• Exhaust port: 1” OD
• Vacuum: 25" Hg
• Exhaust: 50 cfm at 0.2" water
• Nitrogen or CDA (for automatic dispense): 70 psi

Flange Mount System

The Cee^® 200 spin coater is available in a flange mount configuration for wet bench installations.

Cee^® 200 Spray and Puddle Developer

Brewer Science offers both spray and puddle dispense options on the Cee^® Model 200. These dispense methods are normally used in conjunction with a pressure can dispense which holds the developer.