Cee® 200X Precision spin coater
The Cee® Spin Coater, features a space-saving design, On-Board PC controller, full color touch screen interface, and virtually unlimited recipe storage. By using a unique indirect drive system, Cee® spin coaters virtually eliminate risk associated with process chemicals and solvents contacting the spin motor and causing permanent damage. This critical feature ensures industry-leading reliability and up-time for our customers.
The Cee® Spin Coaters configuration includes a lid which can also be exhausted and/or N2 purged for greater environmental control. The Cee® 200X spin coater is capable of spin coating substrates up to 7” square or 200mm round and features high torque for maximum ramping capability. You can also spin coat smaller size substrates (<1cm through 200mm) with a wide array of different sized spin coating chucks. We offer three separate torque/speed options for accommodating specific loads (6,000rpm, 12,000rpm and 16,000rpm).
Programmability
- PC-controlled
- Touch screen interface and display
- Full-color alphanumeric-capable graphical user interface
- 250,000 process recipe programs on board
- A virtually unlimited number of user-defined recipe program steps
- 0.1-second resolution for step times (9,999.9 seconds maximum step time)
- Spin speed: 0 to 6,000 rpm (12,000 rpm option at no charge; 16,000 rpm option available)
- Spin speed acceleration:
- 0 to 30,000 rpm/s unloaded
- 0 to 23,000 rpm/s 200-mm substrate
- 0 to 3,000 rpm/s 6" x 6" x 0.250" photomask recessed chuck
- Connectivity: USB/ethernet port for communications for uploading/downloading coating process parameters with offline firmware standard (unlimited number of offline recipes and recipe steps)
- System capable of controlling third-party host software for high-end IDI/Cybor/Mykrolis positive displacement pumps
- Simultaneous dual automated dispense capability
- Bidirectional speed control/oscillating chuck
- Iteration software (recipe looping)
- Dispense or component outputs: 50
- Security: Password protection option available at no charge
- In-process/dynamic speed/acceleration control
Precision
- Spin speed repeatability: < 0.2 rpm
- Spin speed resolution: < 0.2 rpm
- Substrate sizes: < 1 cm to 200 mm round; 7"x7" square
Reliability
- Indirect drive system protects the spin motor from contact with process chemicals and solvents
- Vacuum and lid interlock
- Industry-leading reliability and uptime
- 1-year full warranty on parts and labor
- Free remote technical support (phone, email, fax) for the life of the product
- Application process assistance for life of the product
Bowl Design
- Teflon® spin bowl for expanded material compatibility
- Integrated bowl ring to eliminate material migration
- Optional stainless steel bowl (for all-stainless-steel construction)
- Optional polyethylene bowl (educational package) available
- Optional polyethylene liners available
- Optional polyethylene/Teflon® splash ring
- Closed and optional open lid designs for process flexibility
- Drain and exhaust ports located in the bottom of bowl
- Optional nitrogen purge for an inert spin environment
Dimensions
- 13.25" W x 19" D x 12" H (33.65cm W x 48.26cm D x 30.48cm H)
- Machine weight: 40 lb (18.14 kg)
- Shipping weight: 100 lb (45.36 kg)
Utilities
- Voltage ranges: 100, 110-125, 208-240 VAC, 50/60 Hz
- Power requirements: 655 Watts
- Drain port: 0.75" OD
- Exhaust port: 1" OD
- Vacuum: 20 to 25" Hg
- Exhaust: 20 to 50 cfm at 0.2" water
- Nitrogen or CDA (for automated dispense): 70 psi