Shown with optional X-Pro configuration
Cee® 300X Heavy-Duty-Drive Spin Coater
The Brewer Science® Cee® 300X heavy-duty-drive spin coater combines an intuitive Windows®-based operating system, extremely accurate spin speed control, and a high horsepower drive for aggressive acceleration. These features combine to ensure the elimination of process variables for a large array of process chemicals and applications. The 300X has a state-of-the-art user interface and has been designed specifically for 300-mm and larger LCD squares up to 14” × 14”.
Benefits
- Onboard Windows®-based PC control for enhanced interface capabilities and connectivity
- Enhanced Lid-lift assist feature (gas spring opens ≥45°)
- Stand alone cabinet and streamlined design for minimized footprint (Chemical Storage)
- X-PRO Workstation integrates stand alone cabinet with an upper exhaust enclosure for creating mini-environment (monitors and data logs ambient conditions)
- New compact design for minimized footprint
- Full-color, 7-inch touch screen display
- Drive system (indirect) with highest horsepower in its class
Download the Cee® X-Pro package data sheet
Programmability
- PC-controlled
- Touch screen interface and display
- 250,000 process recipe programs on board
- A virtually unlimited number of user-defined recipe program steps
- 0.1-second resolution for step times (9,999.9 seconds maximum step time)
- Spin speed: 0 to 6,000 rpm (4000 rpm and 3000 rpm option available for additional acceleration capabilities)
- Spin speed acceleration:
0 to 30,000 rpm/s unloaded
0 to 23,000 rpm/s 300-mm substrate
0 to 3,000 rpm/s 350-mm × 6-mm round recessed spin chuck
0 to 400 rpm/s 14-in × 14-in × 1.1-mm in photomask recessed chuck - Connectivity: USB/ethernet port for communications for uploading/downloading process parameters with offline firmware (offline recipe number and steps unlimited)
- System capable of controlling third-party host software for high-end IDI/Cybor/Mykrolis positivie displacement pumps
- Capabilities to simultaneously-trigger multiple (up to 16) automated dispense nozzles
- Bidirectional speed control/oscillating chuck
- Iteration software (recipe looping)
- Dispense or component outputs: 50
- Security: Password protection option available at no charge
- In-process dynamic speed acceleration control
Precision
- Spin speed repeatability: < 0.2 rpm
- Spin speed resolution: < 0.2 rpm
- Substrate sizes < 1 cm to 450 mm round; 14 in × 14 in square
Reliability
- Indirect drive system protects the spin motor from contact with process chemicals and solvents
- Vacuum and lid interlock
- Industry-leading reliability and uptime
- 1-year full warranty on parts and labor
- Free remote technical support (phone, email, fax) for the life of the product
- Application process assistance for life of the product
Bowl and Exhaust Hood Design
- All stainless steel construction
- Optional ETFE-coated spin bowl for material compatibility
- Optional Teflon®/polyethylene bowl (non-disposable bowl liner)
- Optional closed and open lid design for process flexibility
- Optional Teflon®/polyethylene splash ring
- Drain and exhaust ports located in the bottom of bowl
- Optional nitrogen purge for an insert spin environment
Dimensions
- Machine weight: ~115 lb (52.2 kg)
- Shipping weight: ~250 lb (113.4 kg)
- Cabinet dimensions: 27.75 in (70.5 cm) W × 34.75 in
(88.3 cm) L × 20.25 in (51.5 cm) H
Utilities
- Power requirements: 200-240 VAC, 1350 watts, 7.0 amp
- Drain port: 1 in OD
- Exhaust Port: 1.5 in OD
- Vacuum: 20-25 in hg
- Exhaust: 20-50 cfm at 0.2 in water
- Nitrogen or CDA (for automated dispense): 70 psi