The Brewer Science^® Cee^® 300X heavy-duty-drive spin coater combines an intuitive Windows^®-based operating system, extremely accurate spin speed control, and a high horsepower drive for aggressive acceleration. These features combine to ensure the elimination of process variables for a large array of process chemicals and applications. The 300X has a state-of-the-art user interface and has been designed specifically for 300-mm and larger LCD squares up to 14” × 14”.

Benefits

• Onboard Windows^®-based PC control for enhanced interface capabilities and connectivity
• Enhanced Lid-lift assist feature (gas spring opens ≥45°)
• Stand alone cabinet and streamlined design for minimized footprint (Chemical Storage)
• X-PRO Workstation integrates stand alone cabinet with an upper exhaust enclosure for creating mini-environment (monitors and data logs ambient conditions)
• New compact design for minimized footprint
• Full-color, 7-inch touch screen display
• Drive system (indirect) with highest horsepower in its class

Programmability

• PC-controlled
• Touch screen interface and display
• 250,000 process recipe programs on board
• A virtually unlimited number of user-defined recipe program steps
• 0.1-second resolution for step times (9,999.9 seconds maximum step time)
• Spin speed: 0 to 6,000 rpm (4000 rpm and 3000 rpm option available for additional acceleration capabilities)
• Spin speed acceleration:
  0 to 30,000 rpm/s unloaded
  0 to 23,000 rpm/s 300-mm substrate
  0 to 3,000 rpm/s 350-mm × 6-mm round recessed spin chuck
  0 to 400 rpm/s 14-in × 14-in × 1.1-mm in photomask recessed chuck
• Connectivity: USB/ethernet port for communications for uploading/downloading process parameters with offline firmware (offline recipe number and steps unlimited)
• System capable of controlling third-party host software for high-end IDI/Cybor/Mykrolis positivie displacement pumps
• Capabilities to simultaneously-trigger multiple (up to 16) automated dispense nozzles
• Bidirectional speed control/oscillating chuck
• Iteration software (recipe looping)
• Dispense or component outputs: 50
• Security: Password protection option available at no charge
• In-process dynamic speed acceleration control

Precision

• Spin speed repeatability: < 0.2 rpm
• Spin speed resolution: < 0.2 rpm
• Substrate sizes < 1 cm to 450 mm round; 14 in × 14 in square

Reliability

• Indirect drive system protects the spin motor from contact with process chemicals and solvents
• Vacuum and lid interlock
• Industry-leading reliability and uptime
• 1-year full warranty on parts and labor
• Free remote technical support (phone, email, fax) for the life of the product
• Application process assistance for life of the product

Bowl and Exhaust Hood Design

• All stainless steel construction
• Optional ETFE-coated spin bowl for material compatibility
• Optional Teflon^®/polyethylene bowl (non-disposable bowl liner)
• Optional closed and open lid design for process flexibility
• Optional Teflon^®/polyethylene splash ring
• Drain and exhaust ports located in the bottom of bowl
• Optional nitrogen purge for an insert spin environment

Dimensions

• Machine weight: ~115 lb (52.2 kg)
• Shipping weight: ~250 lb (113.4 kg)
• Cabinet dimensions: 27.75 in (70.5 cm) W × 34.75 in
  (88.3 cm) L × 20.25 in (51.5 cm) H

Utilities

• Power requirements: 200-240 VAC, 1350 watts, 7.0 amp
• Drain port: 1 in OD
• Exhaust Port: 1.5 in OD
• Vacuum: 20-25 in hg
• Exhaust: 20-50 cfm at 0.2 in water
• Nitrogen or CDA (for automated dispense): 70 psi