Wet etching is a lower-cost, higher-throughput alternative to dry-etch processing. The Brewer Science^® ProTEK^® series of etch protection coatings enables simple, effective wet-etching processes for silicon, compound semiconductors, and glass. Edge protection of wafers can also be achieved using the Brewer Science^® EdgeWRAP^® system.

Introduction to Wet Etching of Silicon

• Wet etching uses KOH, TMAH, or other alkaline etchants
• Wet etching results in an anisotropic etch along the silicon crystal plane
• An etch protective mask is required during wet silicon etching
• <100> oriented wafers are commonly used

Wet etching processes are used to fabricate many commercial devices:

• Pressure Sensors
• MEMS Microphones
• MEMS Accelerometers
• High-Brightness LEDs
• Microfluidic Devices
• Advanced IC Packaging