ProTEK® SR Scratch-resistant coating

ProTEK® SR coating is a spin-applied polymeric coating designed to provide maximum protection for fragile, etch-sensitive circuitry placed in direct contact against the interior chuck of the etch chamber. ProTEK® SR coating offers durability and longevity against harsh backside DRIE processes typically utilized by the microelectromechanical systems (MEMS) and integrated circuit (IC) industries.

ProTEK® SR coating offers the following features:

  • Durable polymer coating protects delicate front-side circuitry during backside DRIE etching.
  • High film hardness (9H pencil) resists scratching.
  • High glass transition temperature (117°C) assures ProTEK® SR film will not stick to DRIE chuck.
  • Low outgassing in a vacuum assures no contamination of DRIE chamber or process.
  • Low film ion levels prevent contamination of wafers, tools, and handling equipment.

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Innovative scratch-resistant solution for drie processes

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