ProTEK® SR Coatings for DRIE Processes

ProTEK® SR coating increases yield by protecting front-side circuitry during the backside DRIE process.

Brewer Science is pleased to announce the development of a new innovative scratch-resistant protective coating solution for DRIE etch processes. ProTEK® SR coating is a spin-applied polymeric coating designed to provide maximum protection for fragile, etch-sensitive circuitry placed in direct contact against the interior chuck of the etch chamber. ProTEK® SR coating offers durability and longevity against harsh backside DRIE processes typically utilized by the microelectromechanical systems (MEMS) and integrated circuit (IC) industries.

ProTEK® SR coating offers the following features:

  • Durable polymer coating protects delicate front-side circuitry during backside DRIE etching.
  • High film hardness (9H pencil) resists scratching.
  • High glass transition temperature (117ºC) assures ProTEK® SR film will not stick to DRIE chuck.
  • Low outgassing in a vacuum assures no contamination of DRIE chamber or process.
  • Low film ion levels prevent contamination of wafers, tools, and handling equipment.

DRIE Etch

To learn more about ProTEK® SR coating, please email us at info@brewerscience.com, or you may call +1 573 364 0300 and ask to speak with a sales representative.