Electron Beam Resist
For Electron Beam applications Brewer Science offers PMMA solutions. To improve ease of use, safety and aroma, these products are available in spin-bowl compatible solvents. For special applications, such as T-gates, Brewer Science offers the co-polymer PMMA/MMA in a liquid solution. Developers for these materials are also available.
In addition to T-gate fabrication, PMMA may also be used in applications such as:
- Direct write
- LIGA mold
- Metal lift-off
Brewer Science sells two PMMA Resists having different molecular weights (MW). The high MW resist is 950k and the lower MW resist is STD (approximately 450k). These resists can be purchased in either a Monochlorobenzene or a Spin Bowl Compatible solvent system.
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