BSI

MEMS Products

Materials For MEMS Processing

 

Brewer Science provides novel materials which help make the commercialization of MEMS products possible. Products offered include:

 

ProTEK® Coatings

ProTEK® temporary etch-protective products are spin-applied polymeric coatings designed to protect CMOS-MEMS circuitry during deep silicon etches using hot concentrated potassium hydroxide (KOH).

Please click here for additional information regarding ProTEK® temporary etch-protective products.

 


ProLIFT™ 100 Lift-off Layers


The above photograph is an example of polymer microbridges with SiN posts created using ProLIFT™ coating.

ProLIFT™ 100 lift-off layers are versatile polyimide materials suitable for many MEMS and optoelectronic applications. They improve commercialization of MEMS devices using i-line technologies.

 

    

T-Polyim™ Layers

T-Polyim™ layer is a family of polyimide materials designed to provide extremely transparent, durable coatings at a range of thicknesses. They are ideally suited as passivation layers. T-Polyim™ materials may be patterned using photoresist and a ß-bake process.

 


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