Journal of Electronic Materials Journal of Vacuum Science and Technology Proceedings of SPIE: Advances in Resist Technology and Processing XVIII Proceedings of SPIE: Advances in Resist Technology and Processing XVIII Proceedings of SPIE: Advances in Resist Technology and Processing XVIII Proceedings of SPIE: Advances in Resist Technology and Processing XVIII Proceedings of SPIE: Metrology, Inspection, and Process Control for Microlithography XV Journal of Photopolymer Science and Technology SEMICON China 2001 SEMI Technical Symposium Proceedings of SPIE: Lithography for Semiconductor Manufacturing II