Patents

 

Brewer Science has been a technology leader in the fields of specialty chemicals and equipment for micro- and optoelectronics since 1981. By creating innovative products and technologies, Brewer Science maintains a competitive edge in new and future markets. Constant innovative efforts are captured in the "By the technology" portion of our vision statement. Patents for Brewer Science technologies have also been filed and issued internationally. Some patents are available for licensing.

Intellectual Property & Licensing

Brewer Science Intellectual Property & Licensing

Brewer Science has always been driven to deliver value to our customers. To expand on this commitment, we are making part of our patent portfolio available for licensing.

The Brewer Science intellectual property and licensing team is determined to help you by answering your questions related to our patents and trademarks or to walk you through our licensing process. If you are interested in exploring how your business could benefit from accessing Brewer Science technology, please contact us.

Patent Portfolio

Since its establishment in 1981, Brewer Science has been investing a significant portion of its annual revenue in research and development. For the last 30 years, our portfolio has grown and diversified, and now includes technologies such as:

  • Anti-Reflective Coatings
  • Multilayer Systems
  • Planarizing Materials
  • Protective Coatings
  • Temporary Bonding Solutions
  • Carbon Nanotube Materials
  • Processing Equipment

Licensing Process

Brewer Science offers licenses for rights to patents, know-how, trade secrets, and trademarks. The rights transfer may come in the form of a license, technology transfer, or other legal instrument. Depending on the nature of the technology, licenses may be exclusive or non-exclusive. Licenses may include geographic restrictions. License fees include combinations of flat rate license fees, royalties based on use, and/or royalties based on revenue. Among other factors, the type of licensing arrangement depends on the nature of the technology involved, the requesting party, and whether or not Brewer Science is actively practicing the technology.

Contact Us

For licensing inquiries, please contact the Brewer Science Intellectual Property Department at iplicensing@brewerscience.com. You can also contact us by mail at:

Brewer Science Intellectual Property Department
2401 Brewer Drive
Rolla, MO 65401

Please include your name, title, business/organization, address, phone, e-mail, the specific patent number, technology, or trademark that you are interested in licensing, and any additional details that might help us understand your needs more clearly.

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Brewer Science U.S. Patents

 

Anti-Reflective Coatings

8,383,318 Acid-sensitive, developer-soluble bottom anti-reflective coatings
8,257,910 Underlayers for EUV lithography
7,998,318 Crosslinkable fill compositions for uniformly protecting via and contact holes
7,914,974 Anti-reflective imaging layer for multiple patterning process
7,754,818 Gap-fill materials and bottom anti-reflective coatings comprising hyperbranched polymers
7,745,540 Gap-fill materials and bottom anti-reflective coatings comprising hyperbranched polymers
7,608,380 Spin bowl compatible polyamic acids/imides as wet developable polymer binders for anti-reflective coatings
7,601,483 Anti-reflective coatings using vinyl ether crosslinkers
7,507,783 Thermally curable middle layer comprising polyhedral oligomeric silsesquioxanes for 193-nm trilayer resist process
7,364,835 Developer-soluble materials and methods of using the same in via-first dual damascene applications
7,323,289 Bottom anti-reflective coatings derived from small core molecules with multiple epoxy moieties
7,261,997 Spin bowl compatible polyamic acids/imides as wet developable polymer binders for anti-reflective coatings
7,132,219 Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition
7,132,216 Non-aromatic chromophores for use in polymer anti-reflective coatings
7,108,958 Photosensitive bottom anti-reflective coating
7,038,328 Anti-reflective compositions comprising triazine compounds
7,026,237 Fill material for dual damascene processes
6,962,769 Anti-reflective coating composition with improved spin bowl compatibility
6,894,104 Anti-reflective coatings and dual damascene fill compositions comprising stryrene-allyl alcohol copolymers
6,893,684 Anti-reflective coating compositions for use with low-k dielectric materials
6,872,506 Wet-developable anti-reflective compositions
6,846,612 Organic anti-reflective coating compositions for advanced microlithography
6,680,160 Halogenated anti-reflective coatings
6,670,425 Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings
6,663,916 Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings
6,653,411 Anti-reflective coating compositions comprising polymerized aminoplasts
6,576,408 Thermosetting anti-reflective coatings comprising aryl urethanes of hydroxypropyl cellulose
6,555,287 Non-subliming, difunctionalized ultraviolet dyes for use in anti-reflective coatings
6,524,708 Anti-reflective coating compositions comprising polymerized aminoplasts
6,512,084 Anti-reflective coating compositions comprising polymerized aminoplasts
6,495,305 Halogenated anti-reflective coatings
6,444,320 Thermosetting anti-reflective coatings for full fill dual damascene process
6,432,611 Anti-reflective coating compositions comprising polymerized aminoplasts
6,403,152 Anti-reflective coating compositions comprising polymerized aminoplasts
6,399,686 Anti-reflective coating compositions comprising polymerized aminoplasts
6,391,472 Fill material for dual damascene process
6,323,310 Anti-reflective coating compositions comprising polymerized aminoplasts
6,316,160 Fast-etching, thermosetting anti-reflective coatings derived from cellulosic binders
6,156,479 Thermosetting anti-reflective coatings
6,080,530 Thermosetting polyester anti-reflective coatings for multilayer photoresist processes
6,042,990 Thermosetting polyester anti-reflective coatings for multilayer photoresist processes
5,935,760 Thermosetting polyester anti-reflective coatings for multilayer photoresist processes
5,919,599 Thermosetting anti-reflective coatings at deep ultraviolet
5,919,598 Method for making multilayer resist structures with thermosetting anti-reflective coatings
5,892,096 Non-subliming mid-UV dyes and utra-thin anti-reflective coatings having differential solubility
5,693,691 Thermosetting anti-reflective coatings compositions
5,688,987 Non-subliming mid-UV dyes and ultra-thin organic anti-reflective coatings having differential solubility
5,674,648 Anti-reflective coating
5,578,676 Method for making polymers with intrinsic light-absorbing properties
5,368,989 Photolithographic article utilizing polymers with light-absorbing properties for anti-reflective coating

 

Multilayer Systems

8,877,430 Methods of producing structures using a developer-soluble layer with multilayer technology
8,808,969 Method of making radiation-sensitive sol-gel materials
8,647,809 Metal-oxide films from small molecules for lithographic applications
8,415,083 On-track process for patterning hardmask by multiple dark field exposures
8,206,893 Photoimageable branched polymer
8,168,372 Method of creating photolithographic structures with developer-trimmed hardmask
8,133,659 On-track process for patterning hardmask by multiple dark field exposures
7,939,244 Photosensitive hardmask for microlithography
7,602,066 Method of filling structures for forming via-first dual damascene interconnects
7,449,230 Lithography pattern shrink process and articles
7,364,832 Wet developable hard mask in conjunction with thin photoresist for microphotolithography
7,348,281 Method of filling structures for forming via-first dual damascene interconnects
7,122,296 Lithography pattern shrink process and articles
6,740,469 Developer-soluble metal alkoxide coatings for microelectronic applications

 

Protective Coatings

8,771,927 Acid-etch resistant, protective coatings
8,445,591 Spin-on protective coatings for wet-etch processing of microelectronic substrates
8,399,346 Scratch-resistant coatings for protecting front-side circuitry during backside processing
8,268,449 Thermal- and chemical-resistant acid protection coating material and spin-on thermoplastic adhesive
8,202,442 Spin-on protective coatings for wet-etch processing of microelectronic substrates
8,192,642 Spin-on protective coatings for wet-etch processing of microelectronic substrates
7,758,913 Spin-on protective coatings for wet-etch processing of microelectronic substrates
7,709,178 Alkaline-resistant negative photoresist for silicon wet-etch without silicon nitride
7,695,890 Negative photoresist for silicon KOH etch without silicon nitride
7,678,861 Thermal- and chemical-resistant acid protection coating material and spin-on thermoplastic adhesive
7,316,844 Spin-on protective coatings for wet-etch processing of microelectronic substrate

 

Temporary Bonding Solutions

8,852,391 Method and apparatus for removing a reversibly mounted device wafer from a carrier substrate
8,771,442 Cyclic olefin compositions for temporary wafer bonding
8,236,669 High-temperature spin-on temporary bonding compositions
8,221,571 Cyclic olefin compositions for temporary wafer bonding
8,092,628 Cyclic olefin compositions for temporary wafer bonding
7,935,780 High-temperature spin-on temporary bonding compositions
7,713,835 Thermally decomposable spin-on bonding compositions for temporary wafer bonding

 

Carbon Nanotube Materials

[Patents pending]

 

 

Planarizing Materials

8,865,599 Self-leveling planarization materials for microelectronic topography
7,790,231 Automated process and apparatus for planarization of topographical surfaces
7,455,955 Planarization method for multi-layer lithography processing
6,716,767 Contact planarization materials that generate no volatile byproducts or residue during curing

 

Processing Equipment

8,408,222 Device for coating the outer edge of a substrate during microelectronics manufacturing
7,775,785 Contact planarization apparatus
7,579,044 Process and device for coating the outer edge of a substrate during microelectronics manufacture

 

Other Technologies

8,836,082 Reversal lithography approach by selective deposition of nanoparticles
8,668,992 Fluorinated polyimides with fluorene cardo structure as optical materials that have low absolute thermo-optic coefficients
7,976,894 Materials with thermally reversible curing mechanism
7,833,692 Amine-arresting additives for materials used in photolithographic processes
7,803,458 Hybrid organic-inorganic polymer coatings with high refractive indices
7,749,603 Two-layer transparent electrostatic charge dissipating coating
7,608,342 Photocurable, conductive, transparent polymer coatings
7,192,999 Polyimides for use as high refractive index, thin film materials
6,303,270 Highly plasma etch-resistant photoresist composition containing a photosensitive polymeric titania precursor
5,998,090 High optical density ultra thin organic black matrix system
5,629,665 Conducting-polymer bolometer

 

For information on international patents, please contact Brewer Science by using this email form or by calling +573.364.0300 (USA).