actual images of an exposure matrix performed using silicon substrates with an exposure dose < 200 mJ/cm2 L/S, achieving CD sizes of 6 µm and 3 µm.

actual images of an exposure matrix performed using silicon substrates with an exposure dose < 200 mJ/cm2 L/S, achieving CD sizes of 6 µm and 3 µm.

actual images of an exposure matrix performed using silicon substrates with an exposure dose < 200 mJ/cm2 L/S, achieving CD sizes of 6 µm and 3 µm.

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