Patents
Brewer Science® has been a technology leader in the fields of specialty chemicals and equipment for micro- and optoelectronics since 1981. By creating innovative products and technologies, Brewer Science maintains a competitive edge in new and future markets. Constant innovative efforts are captured in the "By the technology" portion of our vision statement. Patents for Brewer Science technologies have also been filed and issued internationally.
Brewer Science® U.S. Patents
2011
U.S. Patent No. 7,976,894
Materials with thermally reversible curing mechanism
U.S. Patent No. 7,939,244
Photosensitive hardmask for microlithography
U.S. Patent No. 7,935,780
High-temperature spin-on temporary bonding compositions
U.S. Patent No. 7,914,974
Anti-reflective imaging layer for multiple patterning process
2010
U.S. Patent No. 7,833,692
Amine-arresting additives for materials used in photolithographic processes
U.S. Patent No. 7,803,458
Hybrid organic-inorganic polymer coatings with high refractive indices
U.S. Patent No. 7,790,231
Automated process and apparatus for planarization of topographical surfaces
U.S. Patent No. 7,775,785
Contact planarization apparatus
U.S. Patent No. 7,758,913
Spin-on protective coatings for wet-etch processing of microelectronic substrates
U.S. Patent No. 7,754,818
Gap-fill materials and bottom anti-reflective coatings comprising hyperbranched polymers
U.S. Patent No. 7,749,603
Two-layer transparent electrostatic charge dissipating coating
U.S. Patent No. 7,745,540
Gap-fill materials and bottom anti-reflective coatings comprising hyperbranched polymers
U.S. Patent No. 7,713,835
Thermally decomposable spin-on bonding compositions for temporary wafer bonding
U.S. Patent No. 7,709,178
Alkaline-resistant negative photoresist for silicon wet-etch without silicon nitride
U.S. Patent No. 7,695,890
Negative photoresist for silicon KOH etch without silicon nitride
U.S. Patent No. 7,678,861
Thermal- and chemical-resistant acid protection coating material and spin-on thermoplastic adhesive
2009
U.S. Patent No. 7,608,380
Spin bowl compatible polyamic acids/imides as wet developable polymer binders for anti-reflective coatings
U.S. Patent No. 7,608,342
Photocurable, conductive, transparent polymer coatings
U.S. Patent No. 7,602,066
Method of filling structures for forming via-first dual damascene interconnects
U.S. Patent No. 7,601,483
Anti-reflective coatings using vinyl ether crosslinkers
U.S. Patent No. 7,579,044
Process and device for coating the outer edge of a substrate during microelectronics manufacture
U.S. Patent No. 7,507,783
Thermally curable middle layer comprising polyhedral oligomeric silsesquioxanes for 193-nm trilayer resist process
2008
U.S. Patent No. 7,455,955
Planarization method for multi-layer lithography processing
U.S. Patent No. 7,449,230
Lithography pattern shrink process and articles
U.S. Patent No. 7,364,835
Developer-soluble materials and methods of using the same in via-first dual damascene applications
U.S. Patent No. 7,364,832
Wet developable hard mask in conjunction with thin photoresist for microphotolithography
U.S. Patent No. 7,348,281
Method of filling structures for forming via-first dual damascene interconnects
U.S. Patent No. 7,323,289
Bottom anti-reflective coatings derived from small core molecules with multiple epoxy moieties
U.S. Patent No. 7,316,844
Spin-on protective coatings for wet-etch processing of microelectronic substrate
2007
U.S. Patent No. 7,261,997
Spin bowl compatible polyamic acids/imides as wet developable polymer binders for anti-reflective coatings
U.S. Patent No. 7,192,999
Polyimides for use as high refractive index, thin film materials
2006
U.S. Patent No. 7,132,219
Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition
U.S. Patent No. 7,132,216
Non-aromatic chromophores for use in polymer anti-reflective coatings
U.S. Patent No. 7,122,296
Lithography pattern shrink process and articles
U.S. Patent No. 7,108,958
Photosensitive bottom anti-reflective coating
U.S. Patent No. 7,038,328
Anti-reflective compositions comprising triazine compounds
U.S. Patent No. 7,026,237
Fill material for dual damascene processes
2005
U.S. Patent No. 6,962,769
Anti-reflective coating composition with improved spin bowl compatibility
U.S. Patent No. 6,936,405
Organic polymeric antireflective coatings deposited by chemical vapor deposition
U.S. Patent No. 6,900,000
Organic polymeric anti-reflective coatings deposited by chemical vapor deposition
U.S. Patent No. 6,894,104
Anti-reflective coatings and dual damascene fill compositions comprising stryrene-allyl alcohol copolymers
U.S. Patent No. 6,893,684
Anti-reflective coating compositions for use with low-k dielectric materials
U.S. Patent No. 6,872,506
Wet-developable anti-reflective compositions
U.S. Patent No. 6,869,747
Organic polymeric anti-reflective coatings deposited by chemical vapor deposition
U.S. Patent No. 6,852,474
Polymeric anti-reflective coatings deposited by plasma-enhanced chemical vapor deposition
U.S. Patent No. 6,852,473 (co-assignee: Infineon Technologies)
Anti-reflective coating conformality control
U.S. Patent No. 6,846,612
Organic anti-reflective coating compositions for advanced microlithography
2004
U.S. Patent No. 6,756,418
Photosensitive resin compositions for color filter applications
U.S. Patent No. 6,740,469
Developer-soluble metal alkoxide coatings for microelectronic applications
U.S. Patent No. 6,737,203
Photosensitive resin compositions for color filter applications
U.S. Patent No. 6,716,767
Contact planarization materials that generate no volatile byproducts or residue during curing
U.S. Patent No. 6,680,160
Halogenated anti-reflective coatings
2003
U.S. Patent No. 6,670,425
Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings
U.S. Patent No. 6,663,916
Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings
U.S. Patent No. 6,653,411
Anti-reflective coating compositions comprising polymerized aminoplasts
U.S. Patent No. 6,598,765
Disposable syringe dispenser system
U.S. Patent No. 6,576,408
Thermosetting anti-reflective coatings comprising aryl urethanes of hydroxypropyl cellulose
U.S. Patent No. 6,555,287
Non-subliming, difunctionalized ultraviolet dyes for use in anti-reflective coatings
U.S. Patent No. 6,524,708
Anti-reflective coating compositions comprising polymerized aminoplasts
U.S. Patent No. 6,512,084
Anti-reflective coating compositions comprising polymerized aminoplasts
2002
U.S. Patent No. 6,495,305
Halogenated anti-reflective coatings
U.S. Patent No. 6,444,320
Thermosetting anti-reflective coatings for full fill dual damascene process
U.S. Patent No. 6,432,611
Anti-reflective coating compositions comprising polymerized aminoplasts
U.S. Patent No. 6,403,152
Anti-reflective coating compositions comprising polymerized aminoplasts
U.S. Patent No. 6,399,686
Anti-reflective coating compositions comprising polymerized aminoplasts
U.S. Patent No. 6,391,472
Fill material for dual damascene process
2001
U.S. Patent No. 6,323,310
Anti-reflective coating compositions comprising polymerized aminoplasts
U.S. Patent No. 6,316,160
Fast-etching, thermosetting anti-reflective coatings derived from cellulosic binders
U.S. Patent No. 6,303,270
Highly plasma etch-resistant photoresist composition containing a photosensitive polymeric titania precursor
2000
U.S. Patent No. 6,156,479
Thermosetting anti-reflective coatings
U.S. Patent No. 6,080,530
Thermosetting polyester anti-reflective coatings for multilayer photoresist processes
U.S. Patent No. 6,042,990
Thermosetting polyester anti-reflective coatings for multilayer photoresist processes
1999
U.S. Patent No. 5,998,090
High optical density ultra thin organic black matrix system
U.S. Patent No. 5,935,760
Thermosetting polyester anti-reflective coatings for multilayer photoresist processes
U.S. Patent No. 5,919,599
Thermosetting anti-reflective coatings at deep ultraviolet
U.S. Patent No. 5,919,598
Method for making multilayer resist structures with thermosetting anti-reflective coatings
U.S. Patent No. 5,892,096
Non-subliming mid-UV dyes and utra-thin anti-reflective coatings having differential solubility
1998
U.S. Patent No. 5,780,201
Ultra thin photolithographically imageable organic black matrix coating material
U.S. Patent No. 5,753,523
Method for making airbridge from ion-implanted conductive polymers
1997
U.S. Patent No. 5,693,691
Thermosetting anti-reflective coatings compositions
U.S. Patent No. 5,688,987
Non-subliming mid-UV dyes and ultra-thin organic anti-reflective coatings having differential solubility
U.S. Patent No. 5,674,648
Anti-reflective coating
U.S. Patent No. 5,633,465
Pirani pressure sensor
U.S. Patent No. 5,629,665
Conducting-polymer bolometer
1996
U.S. Patent No. 5,578,676
Method for making polymers with intrinsic light-absorbing properties
U.S. Patent No. 5,505,093
Homogeneously conductive polymer films as strain gauges
1995
U.S. Patent No. 5,401,613
Method of manufacturing microelectronic devices having multifunctional photolithographic layers
1994
U.S. Patent No. 5,368,989
Photolithographic article utilizing polymers with light-absorbing properties for anti-reflective coating
U.S. Patent No. 5,362,608
Microlithographic substrate cleaning and compositions therefor
U.S. Patent No. 5,340,619
Method of manufacturing a color filter array
U.S. Patent No. 5,336,925
Positive working polyamic acid/imide photoresist compositions and their use as dielectrics
U.S. Patent No. 5,281,690
Base-soluble polyimide release layers for use in microlithographic processing
1993
U.S. Patent No. 5,262,195
Soluble conducting polymers and their use in manufacturing electronic devices
U.S. Patent No. 5,234,990
Polymers with intrinsic light-absorbing properties for anti-reflective coating applications in deep ultraviolet microlithography
1992
U.S. Patent No. 5,138,424
Positive working polyamic acid/imide photoresist compositions and their use as dielectrics
U.S. Patent No. 5,110,697
Multifunctional photolithographic compositions
1991
U.S. Patent No. 5,057,399
Method for making polyimide microlithographic compositions soluble in alkaline media
U.S. Patent No. 5,024,922
Positive working polyamic acid/imide and diazoquinone photoresist with high temperature pre-bake
1990
U.S. Patent No. 4,950,583
Adhesion promoting product and process for treating an integrated circuit therewith
U.S. Patent No. 4,910,122
Anti-reflective coating
1989
U.S. Patent No. 4,876,165
Light filters for microelectronics
U.S. Patent No. 4,822,718
Light absorbing coating
1988
U.S. Patent No. 4,732,858
Adhesion promoting product and process for treating an integrated circuit substrate
For information on international patents, please contact Brewer Science by using this email form or by calling +573.364.0300 (USA).