Brewer Science, Inc.® has been a technology leader in the fields of specialty chemicals and equipment for micro- and optoelectronics since 1981. Creating innovative products and technologies continues to ensure that Brewer Science maintains a competitive edge in new and future markets. Our constant innovative efforts are captured in the "By the technology" portion of our vision statement. We have taken an active approach to patenting our discoveries, as shown by this list of the company's U.S. patents. Patents for Brewer Science technologies have also been filed and issued internationally.
Our U.S. Patents
April 2008
U.S. Patent No. 7,364,835
Developer-soluble materials and methods of using the same in via-first dual damascene applications
U.S. Patent No. 7,364,832
Wet developable hard mask in conjunction with thin photoresist for microphotolithography
March 2008
U.S. Patent No. 7,348,281
Method of filling structures for forming via-first dual damascene interconnects
January 2008
U.S. Patent No. 7,323,289
Bottom anti-reflective coatings derived from small core molecules with multiple epoxy moieties
U.S. Patent No. 7,316,844
Spin-on protective coatings for wet-etch processing of microelectronic substrates
August 2007
U.S. Patent No. 7,261,997
Spin bowl compatible polyamic acids/imides as wet developable polymer binders for anti-reflective coatings
March 2007
U.S. Patent No. 7,192,999
Polyimides for use as high refractive index, thin film materials
November 2006
U.S. Patent No. 7,132,219
Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition
U.S. Patent No. 7,132,216
Non-aromatic chromophores for use in polymer anti-reflective coatings
October 2006
U.S. Patent No. 7,122,296
Lithography pattern shrink process and articles
September 2006
U.S. Patent No. 7,108,958
Photosensitive bottom anti-reflective coating
May 2006
U.S. Patent No. 7,038,328
Anti-reflective compositions comprising triazine compounds
April 2006
U.S. Patent No. 7,026,237
Fill material for dual damascene processes
November 2005
U.S. Patent No. 6,962,769
Anti-reflective coating composition with improved spin bowl compatibility
August 2005
U.S. Patent No. 6,936,405
Organic polymeric antireflective coatings deposited by chemical vapor deposition
May 2005
U.S. Patent No. 6,900,000
Organic polymeric anti-reflective coatings deposited by chemical vapor deposition
U.S. Patent No. 6,894,104
Anti-reflective coatings and dual damascene fill compositions comprising stryrene-allyl alcohol copolymers
U.S. Patent No. 6,893,684
Anti-reflective coating compositions for use with low-k dielectric materials
March 2005
U.S. Patent No. 6,872,506
Wet-developable anti-reflective compositions
U.S. Patent No. 6,869,747
Organic polymeric anti-reflective coatings deposited by chemical vapor deposition
February 2005
U.S. Patent No. 6,852,474
Polymeric anti-reflective coatings deposited by plasma-enhanced chemical vapor deposition
U.S. Patent No. 6,852,473 (co-assignee: Infineon Technologies)
Anti-reflective coating conformality control
January 2005
U.S. Patent No. 6,846,612
Organic anti-reflective coating compositions for advanced microlithography
June 2004
U.S. Patent No. 6,756,418
Photosensitive resin compositions for color filter applications
May 2004
U.S. Patent No. 6,740,469
Developer-soluble metal alkoxide coatings for microelectronic applications
U.S. Patent No. 6,737,203
Photosensitive resin compositions for color filter applications
April 2004
U.S. Patent No. 6,716,767
Contact planarization materials that generate no volatile byproducts or residue during curing
January 2004
U.S. Patent No. 6,680,160
Halogenated anti-reflective coatings
December 2003
U.S. Patent No. 6,670,425
Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings
U.S. Patent No. 6,663,916
Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings
November 2003
U.S. Patent No. 6,653,411
Anti-reflective coating compositions comprising polymerized aminoplasts
July 2003
U.S. Patent No. 6,598,765
Disposable syringe dispenser system
June 2003
U.S. Patent No. 6,576,408
Thermosetting anti-reflective coatings comprising aryl urethanes of hydroxypropyl cellulose
April 2003
U.S. Patent No. 6,555,287
Non-subliming, difunctionalized ultraviolet dyes for use in anti-reflective coatings
February 2003
U.S. Patent No. 6,524,708
Anti-reflective coating compositions comprising polymerized aminoplasts
January 2003
U.S. Patent No. 6,512,084
Anti-reflective coating compositions comprising polymerized aminoplasts
December 2002
U.S. Patent No. 6,495,305
Halogenated anti-reflective coatings
September 2002
U.S. Patent No. 6,444,320
Thermosetting anti-reflective coatings for full fill dual damascene process
August 2002
U.S. Patent No. 6,432,611
Anti-reflective coating compositions comprising polymerized aminoplasts
June 2002
U.S. Patent No. 6,403,152
Anti-reflective coating compositions comprising polymerized aminoplasts
U.S. Patent No. 6,399,686
Anti-reflective coating compositions comprising polymerized aminoplasts
May 2002
U.S. Patent No. 6,391,472
Fill material for dual damascene process
November 2001
U.S. Patent No. 6,323,310
Anti-reflective coating compositions comprising polymerized aminoplasts
U.S. Patent No. 6,316,160
Fast-etching, thermosetting anti-reflective coatings derived from cellulosic binders
October 2001
U.S. Patent No. 6,303,270
Highly plasma etch-resistant photoresist composition containing a photosensitive polymeric titania precursor
December 2000
U.S. Patent No. 6,156,479
Thermosetting anti-reflective coatings
March 2000
U.S. Patent No. 6,080,530
Thermosetting polyester anti-reflective coatings for multilayer photoresist processes
U.S. Patent No. 6,042,990
Thermosetting polyester anti-reflective coatings for multilayer photoresist processes
December 1999
U.S. Patent No. 5,998,090
High optical density ultra thin organic black matrix system
August 1999
U.S. Patent No. 5,935,760
Thermosetting polyester anti-reflective coatings for multilayer photoresist processes
July 1999
U.S. Patent No. 5,919,599
Thermosetting anti-reflective coatings at deep ultraviolet
U.S. Patent No. 5,919,598
Method for making multilayer resist structures with thermosetting anti-reflective coatings
April 1999
U.S. Patent No. 5,892,096
Non-subliming mid-UV dyes and utra-thin anti-reflective coatings having differential solubility
July 1998
U.S. Patent No. 5,780,201
Ultra thin photolithographically imageable organic black matrix coating material
May 1998
U.S. Patent No. 5,753,523
Method for making airbridge from ion-implanted conductive polymers
December 1997
U.S. Patent No. 5,693,691
Thermosetting anti-reflective coatings compositions
November 1997
U.S. Patent No. 5,688,987
Non-subliming mid-UV dyes and ultra-thin organic anti-reflective coatings having differential solubility
October 1997
U.S. Patent No. 5,674,648
Anti-reflective coating
May 1997
U.S. Patent No. 5,629,665
Conducting-polymer bolometer
November 1996
U.S. Patent No. 5,578,676
Method for making polymers with intrinsic light-absorbing properties
April 1996
U.S. Patent No. 5,505,093
Homogeneously conductive polymer films as strain gauges
March 1995
U.S. Patent No. 5,401,613
Method of manufacturing microelectronic devices having multifunctional photolithographic layers
November 1994
U.S. Patent No. 5,368,989
Photolithographic article utilizing polymers with light-absorbing properties for anti-reflective coating
U.S. Patent No. 5,362,608
Microlithographic substrate cleaning and compositions therefor
August 1994
U.S. Patent No. 5,340,619
Method of manufacturing a color filter array
U.S. Patent No. 5,336,925
Positive working polyamic acid/imide photoresist compositions and their use as dielectrics
January 1994
U.S. Patent No. 5,281,690
Base-soluble polyimide release layers for use in microlithographic processing
November 1993
U.S. Patent No. 5,262,195
Soluble conducting polymers and their use in manufacturing electronic devices
August 1993
U.S. Patent No. 5,234,990
Polymers with intrinsic light-absorbing properties for anti-reflective coating applications in deep ultraviolet microlithography
August 1992
U.S. Patent No. 5,138,424
Positive working polyamic acid/imide photoresist compositions and their use as dielectrics
May 1992
U.S. Patent No. 5,110,697
Multifunctional photolithographic compositions
October 1991
U.S. Patent No. 5,057,399
Method for making polyimide microlithographic compositions soluble in alkaline media
June 1991
U.S. Patent No. 5,024,922
Positive working polyamic acid/imide and diazoquinone photoresist with high temperature pre-bake
August 1990
U.S. Patent No. 4,950,583
Adhesion promoting product and process for treating an integrated circuit therewith
March 1990
U.S. Patent No. 4,910,122
Anti-reflective coating
October 1989
U.S. Patent No. 4,876,165
Light filters for microelectronics
April 1989
U.S. Patent No. 4,822,718
Light absorbing coating
March 1988
U.S. Patent No. 4,732,858
Adhesion promoting product and process for treating an integrated circuit substrate
For information on international patents, please contact Brewer Science by using this email form or by calling +573.364.0300 (USA).
