Patents

At Brewer Science, we believe that protecting our ideas and inventions is an investment in ourselves and the future of our company. We know that even though changing technologies allow many products to be made more easily and information is much more readily available than ever before, our inventions are no less valuable to us and to the world. Through the security of intellectual property protection, we are able to bring you innovative products.

9,328,246

Nonpolymeric antireflection compositions containing adamantyl groups

6,080,530

Thermosetting polyester anti-reflective coatings for multilayer photoresist processes

6,042,990

Thermosetting polyester anti-reflective coatings for multilayer photoresist processes

5,935,760

Thermosetting polyester anti-reflective coatings for multilayer photoresist processes

5,919,599

Thermosetting anti-reflective coatings at deep ultraviolet

5,919,598

Method for making multilayer resist structures with thermosetting anti-reflective coatings

5,892,096

Non-subliming mid-UV dyes and utra-thin anti-reflective coatings having differential solubility

5,693,691

Thermosetting anti-reflective coatings compositions

5,688,987

Non-subliming mid-UV dyes and ultra-thin organic anti-reflective coatings having differential solubility

5,674,648

Anti-reflective coating

5,578,676

Method for making polymers with intrinsic light-absorbing properties

5,368,989

Photolithographic article utilizing polymers with light-absorbing properties for anti-reflective coating

6,893,684

Anti-reflective coating compositions for use with low-k dielectric materials

6,872,506

Wet-developable anti-reflective compositions

6,846,612

Organic anti-reflective coating compositions for advanced microlithography

6,680,160

Halogenated anti-reflective coatings

6,670,425

Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings

6,663,916

Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings

6,653,411

Anti-reflective coating compositions comprising polymerized aminoplasts

6,576,408

Thermosetting anti-reflective coatings comprising aryl urethanes of hydroxypropyl cellulose

6,555,287

Non-subliming, difunctionalized ultraviolet dyes for use in anti-reflective coatings

6,524,708

Anti-reflective coating compositions comprising polymerized aminoplasts

6,512,084

Anti-reflective coating compositions comprising polymerized aminoplasts

6,495,305

Halogenated anti-reflective coatings

6,444,320

Thermosetting anti-reflective coatings for full fill dual damascene process

6,432,611

Anti-reflective coating compositions comprising polymerized aminoplasts

6,403,152

Anti-reflective coating compositions comprising polymerized aminoplasts

6,399,686

Anti-reflective coating compositions comprising polymerized aminoplasts

6,391,472

Fill material for dual damascene process

6,323,310

Anti-reflective coating compositions comprising polymerized aminoplasts

6,316,160

Fast-etching, thermosetting anti-reflective coatings derived from cellulosic binders

6,156,479

Thermosetting anti-reflective coatings

9,110,372

Anti-reflective coatings using vinyl ether crosslinkers

8,383,318

Acid-sensitive, developer-soluble bottom anti-reflective coatings

8,257,910

Underlayers for EUV lithography

7,998,318

Crosslinkable fill compositions for uniformly protecting via and contact holes

7,914,974

Anti-reflective imaging layer for multiple patterning process

7,754,818

Gap-fill materials and bottom anti-reflective coatings comprising hyperbranched polymers

7,745,540

Gap-fill materials and bottom anti-reflective coatings comprising hyperbranched polymers

7,608,380

Spin bowl compatible polyamic acids/imides as wet developable polymer binders for anti-reflective coatings

7,601,483

Anti-reflective coatings using vinyl ether crosslinkers

7,507,783

Thermally curable middle layer comprising polyhedral oligomeric silsesquioxanes for 193-nm trilayer resist process

7,364,835

Developer-soluble materials and methods of using the same in via-first dual damascene applications

7,323,289

Bottom anti-reflective coatings derived from small core molecules with multiple epoxy moieties

7,261,997

Spin bowl compatible polyamic acids/imides as wet developable polymer binders for anti-reflective coatings

7,132,219

Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition

7,132,216

Non-aromatic chromophores for use in polymer anti-reflective coatings

7,108,958

Photosensitive bottom anti-reflective coating

7,038,328

Anti-reflective compositions comprising triazine compounds

7,026,237

Fill material for dual damascene processes

6,962,769

Anti-reflective coating composition with improved spin bowl compatibility

6,894,104

Anti-reflective coatings and dual damascene fill compositions comprising stryrene-allyl alcohol copolymers

8,133,659

On-track process for patterning hardmask by multiple dark field exposures

7,939,244

Photosensitive hardmask for microlithography

7,602,066

Method of filling structures for forming via-first dual damascene interconnects

7,364,832

Wet developable hard mask in conjunction with thin photoresist for microphotolithography

7,348,281

Method of filling structures for forming via-first dual damascene interconnects

7,122,296

Lithography pattern shrink process and articles

6,740,469

Developer-soluble metal alkoxide coatings for microelectronic applications

9,102,129

Spin-on carbon compositions for lithographic processing

8,968,989

Assist layers for EUV lithography

8,895,230

Spin-on carbon compositions for lithographic processing

8,877,430

Methods of producing structures using a developer-soluble layer with multilayer technology

8,808,969

Method of making radiation-sensitive sol-gel materials

8,647,809

Metal-oxide films from small molecules for lithographic applications

8,415,083

On-track process for patterning hardmask by multiple dark field exposures

8,206,893

Photoimageable branched polymer

8,168,372

Method of creating photolithographic structures with developer-trimmed hardmask

9,249,013

Silicon hardmask layer for directed self-assembly

9,123,541

Highly etch-resistant polymer block for use in block copolymers for directed self-assembly

8,771,927

Acid-etch resistant, protective coatings

8,445,591

Spin-on protective coatings for wet-etch processing of microelectronic substrates

8,399,346

Scratch-resistant coatings for protecting front-side circuitry during backside processing

8,268,449

Thermal- and chemical-resistant acid protection coating material and spin-on thermoplastic adhesive

8,202,442

Spin-on protective coatings for wet-etch processing of microelectronic substrates

8,192,642

Spin-on protective coatings for wet-etch processing of microelectronic substrates

7,758,913

Spin-on protective coatings for wet-etch processing of microelectronic substrates

7,709,178

Alkaline-resistant negative photoresist for silicon wet-etch without silicon nitride

7,695,890

Negative photoresist for silicon KOH etch without silicon nitride

7,678,861

Thermal- and chemical-resistant acid protection coating material and spin-on thermoplastic adhesive

7,316,844

Spin-on protective coatings for wet-etch processing of microelectronic substrate

9,263,314

Multiple bonding layers for thin-wafer handling

9,224,631

Multiple bonding layers for thin-wafer handling

9,127,126

Development of high-viscosity bonding layer through in-situ polymer chain extension

9,111,981

Method for reversibly mounting a device wafer to a carrier substrate

9,099,512

Article including a device wafer reversibly mountable to a carrier substrate

8,940,104

Cleaning composition for temporary wafer bonding materials

8,852,391

Method and apparatus for removing a reversibly mounted device wafer from a carrier substrate

8,771,442

Cyclic olefin compositions for temporary wafer bonding

8,236,669

High-temperature spin-on temporary bonding compositions

8,221,571

Cyclic olefin compositions for temporary wafer bonding

8,092,628

Cyclic olefin compositions for temporary wafer bonding

7,935,780

High-temperature spin-on temporary bonding compositions

7,713,835

Thermally decomposable spin-on bonding compositions for temporary wafer bonding

9,157,003

Highly soluble carbon nanotubes with enhanced conductivity

8,865,599

Self-leveling planarization materials for microelectronic topography

7,790,231

Automated process and apparatus for planarization of topographical surfaces

7,455,955

Planarization method for multi-layer lithography processing

6,716,767

Contact planarization materials that generate no volatile byproducts or residue during curing

7,579,044

Process and device for coating the outer edge of a substrate during microelectronics manufacture

8,408,222

Device for coating the outer edge of a substrate during microelectronics manufacturing

7,775,785

Contact planarization apparatus

9,299,778

CVD-free, scalable processes for the production of silicon micro- and nanostructures

9,117,757

Silicone polymers with high refractive indices and extended pot life

8,836,082

Reversal lithography approach by selective deposition of nanoparticles

8,668,992

Fluorinated polyimides with fluorene cardo structure as optical materials that have low absolute thermo-optic coefficients

7,976,894

Materials with thermally reversible curing mechanism

7,833,692

Amine-arresting additives for materials used in photolithographic processes

7,803,458

Hybrid organic-inorganic polymer coatings with high refractive indices

7,749,603

Two-layer transparent electrostatic charge dissipating coating

7,608,342

Photocurable, conductive, transparent polymer coatings

7,192,999

Polyimides for use as high refractive index, thin film materials

6,303,270

Highly plasma etch-resistant photoresist composition containing a photosensitive polymeric titania precursor

5,998,090

High optical density ultra thin organic black matrix system

5,629,665

Conducting-polymer bolometer

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