Protective Coatings

Wet etching is a lower-cost, higher-throughput alternative to dry-etch processing. The Brewer Science® ProTEK® series of etch protection coatings enables simple, effective wet-etching processes for silicon, compound semiconductors, and glass.

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Introduction to Wet Etching of Silicon

  • Wet etching uses KOH, TMAH, or other alkaline etchants
  • Wet etching results in an anisotropic etch along the silicon crystal plane
  • An etch protective mask is required during wet silicon etching
  • Oriented wafers are commonly used

protek-applications

Wet etching processes are used to fabricate many commercial devices:

  • Pressure Sensors
  • MEMS Microphones
  • MEMS Accelerometers
  • High-Brightness LEDs
  • Microfluidic Devices
  • Advanced IC Packaging

All Brewer Science® protective coatings allow micromachining to take place closer to packaging, which simplifies the processes and improves device yield. The low-temperature processing of these films allows them to be coated over CMOS structures, unlike SiO2 or SiN layers.

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Protective coatings also allow the release of membranes and proof masks and the creation of through-silicon vias (TSVs) as a last step before packaging. This capability improves the process and device yield.


Learn more about our protective coatings in development